"Qiushi Zhu,Junzaburo Yamada,Nozomu Kishi,Masato Watanabe,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Effects of plasma dynamics on the EUV emission from laser assisted discharge produced Sn plasma EUV source","2010 International Symposium on Extreme Ultraviolet Lithography","Web",,,,,2010,Nov. "Qiushi Zhu,Junzaburo Yamada,Nozomu Kishi,Tomonao Hosokai,Masato Watanabe,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Structure and Expansion Characteristics of Laser Ablation Tin Plasma into a Vacuum",,"Jpn. J. Appl. Phys.","The Japan Society of Applied Physics","Vol. 49"," 056201","pp. 1-6",2010,May