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"Zhu Qiushi,Takahiro Muto,Junzaburo Yamada,Nozomu Kishi,Masato watanabe,Akitoshi Okino,Kazuhiko Horioka,Eiki Hotta","Estimation of electron temperature and density of the decay plasma in a LADPP EUV source","Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology","The Papers of Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology","IEE Japan",,,"pp. 15-20",2011,Dec.
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