"前田幸平,Van Nhu Hai,西岡國生,松谷晃宏,立木隆,内田貴司","MOD 法により Si3N4/SiO2メンブレン上に製作したVOxマイクロボロメータの特性評価",,"電気学会論文誌 A",,"Vol. 138","No. 9","pp. 471-477",2018,Sept. "Tomotarou Ezaki,Akihiro Matsutani,Kunio Nishioka,Dai Shoji,Mina Sato,Takayuki Okamoto,Toshihiro Isobe,Akira Nakajima,Sachiko Matsushita","Surface potential on gold nanodisc arrays fabricated on silicon under light irradiation",,"Surface Science",,"Vol. 672-673",,"pp. 62?67",2018,June "松谷晃宏,西岡國生,佐藤美那","XeF2気相エッチングによるSi マイクロ凹面鏡構造の製作","第65回応用物理学会春季学術講演会","第65回応用物理学会春季学術講演会 講演予稿集",,," 17p-P2-10","p. 01-022",2018,Mar. "三田 真衣,松谷 晃宏,西岡 國生,佐藤 美那,磯部 敏宏,中島 章,松下 祥子","金属コーティングシリカ球ピラミッドアレイの作製とその光学特性","第65回応用物理学会春季学術講演会",,,,,,2018,Mar. "陳政霖,松谷 晃宏,西岡 國生,朴 鍾?,初澤 毅,?田 保子","ヒドロゲルファイバー表面形状形成のためのマイクロノズル作製","第78回応用物理学会秋季学術講演会","第78回応用物理学会秋季学術講演会集",,,,,2017,Sept. "前田 幸平,西岡國生,ヴァン ニュハイ,松谷晃宏,立木 隆,内田 貴司","Deep-RIEとXeF2気相エッチングによるVOx/Si3N4/SiO2メンブレンの製作","第64回応用物理学会春季学術講演会","第64回応用物理学会春季学術講演会講演予稿集",,,," 14p-317-3",2017,Mar. "江崎 智太郎,松谷 晃宏,西岡 國生,庄司 大,佐藤 美那,岡本 隆之,磯部 敏宏,中島 章,松下 祥子","プラズモン共鳴により生じる金属ナノ構造体の表面電位差の測定","第63回応用物理学会春季学術講演会",,,,,,2017,Mar. "Tsuyoshi Takahashi,Akihiro Matsutani,Dai Shoji,Kunio Nishioka,Mina Sato,Takayuki Okamoto,Tomotarou Ezaki,Toshihiro Isobe,Akira Nakajima,Sachiko Matsushita","Optical performance of Au hemispheric sub-microstructure on polystyrene quadrumer",,"Colloids. Surf. A.",,"Vol. 513",,"pp. 51-56",2017,Jan. "Tsuyoshi Takahashi,Akihiro Matsutani,Dai Shoji,Kunio Nishioka,Toshihiro Isobe,Akira Nakajima,Sachiko Matsushita","Microfabrication of polystyrene quadrupole combined with top-down and bottom-up approach","Pacifichem 2015",,,,,,2016,Dec. "清水美咲,西岡國生,松谷晃宏,吉田和弘,金俊完","DRIEによる高アスペクト比三角柱?スリット形電極対(TPSE)の製作に関する研究","山梨講演会2016","山梨講演会講演論文集",,,"No. 160-3","p. 161-162",2016,Oct. "Misaki Shimizu,Kunio Nishioka,Akihiro Matsutani,Kazuhiro Yoshida,Joon-wan Kim","Study on Fabrication of High Aspect Ratio TPSE by using DRIE","20th International Conference on Mechatronics Technology(ICMT2016)","20th International Conference on Mechatronics Technology(ICMT2016)",,,,"p. 32-33",2016,Oct. "土子政貴,青木才子,松谷晃宏,西岡國生","脂肪酸を添加した溶液中におけるマイクロパターン表面の摩擦特性","トライボロジー会議2016秋新潟",,,,,,2016,Oct. "江崎 智太郎,松谷 晃宏,西岡 國生,庄司 大,佐藤 美那,岡本 隆之,磯部 敏宏,中島 章,松下 祥子","Si/SiO2上金ナノ円盤の表面電位の光照射依存およびその構造依存性","第77回応用物理学会秋季学術講演会",,,,,,2016,Sept. "Akihiro Matsutani,Kunio Nishioka,Mina Sato","Energy dispersive X-ray spectroscopy analysis of Si sidewall surface etched by deep-reactive ion etching",,"Japanese Journal of Applied Physics",,"vol. 55",,"p. 06GH05",2016,Apr. "西岡國生,佐藤美那,松谷晃宏","Deep-RIEにより形成されたトレンチ側面の化学組成に関するプラズマ発光分光分析からの考察","第63回応用物理学会春季学術講演会",,,,," 21a-P3-11",2016,Mar. "大竹真理子,岸哲生,矢野哲司,松谷晃宏,西岡國生","一方向性光結合を示すテルライトカ?ラス回折格子の作製","The 26th Meeting on Glasses for Photonics",,,,,,2016,Jan. "Tomotarou Ezaki,Akihiro Matsutani,Kunio Nishioka,Dai Shoji,Mina Sato,Takayuki Okamoto,Toshihiro Isobe,Akira Nakajima,Sachiko Matsushita","Kelvin probe force microscopic images on gold nanodisks with and without light irradiation","The 2016 MRS Fall Meeting & Exhibit",,,,,,2016, "Akihiro Matsutani,Mina Sato,Kunio Nishioka,Dai Shoji","EDX analysis of Si sidewall surface etched by deep-RIE process","28th International Microprocesses and Nanotechnology Conference (MNC2015)",,," 12P-7-42",,,2015,Nov. "Sachiko Matsushita,Akihiro Matsutani,Yasushi Morii,Daito Kobayashi,Kunio Nishioka,Dai Shoji,Mina Sato,Tetsu Tatsuma,Takumi Sannomiya,Toshihiro Isobe,Akira Nakajima","Calculation and Fabrication of Two-dimensional Complete Photonic Bandgap Structures composed of Rutile TiO2 Single Crystals in Air/Liquid",,"J. MATER. SCI.",,"Vol. 51","No. 2","pp. 1066-1073",2015,Sept. "佐藤 美那,西岡國生,庄司大,松谷晃宏","Deep-RIEにより深掘りエッチングされたSiエッチング側面のEDX分析","第62回応用物理学会春季学術講演会",,,,,,2015,Mar. "高橋 毅,松谷 晃宏,庄司 大,西岡 國生,佐藤 美那,磯部 敏宏,中島 章,松下 祥子","トップダウン・ボトムアップ統合アプローチによるポリスチレン四重極子の作製","応用物理学会春季学術講演会",,,,,,2015,Mar. "S. Sano,K. Nishioka,A. Matsutani,T. Isobe,A. Nakajima,S. Matsushita","Simple fabrication of micro-polygons and micro-honeycombs utilizing thermal deformation of monolayer colloidal crystals during reactive ion etching",,"Colloid. Surf. A",,"Vol. 486",,"pp. 1-5",2015, "T. Takahashi,A. Matsutani,D. Shoji,K. Nishioka,M. Sato,T. Isobe,A. Nakajima,S. Matsushita","Microfabrication for a polystyrene quadrupole by template-assisted self-assembly",,"Colloid. Surf.A",,"Vol. 484","No. 5","pp. 75-80",2015, "Akihiro Matsutani,Kunio Nishioka,Mina Sato,Dai Shoji,Daito Kobayashi,Toshihiro Isobe,Akira Nakajima,Tetsu Tatsuma,Sachiko Matsushita","Angled etching of (001) rutile Nb-TiO2 substrate using SF6-based capacitively coupled plasma reactive ion etching",,"Japanese Journal of Applied Physics",,"Vol. 53",,"p. 06JF02",2014,May "小林大斗,松谷晃宏,西岡國生,庄司 大,佐藤 美那,磯部敏宏,中島章,立間 徹,松下祥子","傾斜ドライエッチングを用いた酸化チタンフォトニック結晶の作製と評価","第61回 応用物理学会春季学術講演会",,,,,,2014,Mar. "Akihiro Matsutani,Mikiro Hayashi,Yasushi Morii,Kunio Nishioka,Toshihiro Isobe,Akira Nakajima,Sachiko Matsushita","SF6-Based Deep Reactive Ion Etching of (001) Rutile TiO2 Substrate for Photonic Crystal Structure with Wide Complete Photonic Band Gap",,"Japanese Journal of Applied Physics",,"Vol. 51",," 098002",2012,Aug. "林未来郎,守井泰士,松谷晃宏,西岡國生,磯部敏宏,松下祥子,中島章","ドライエッチングによる(001)TiO2単結晶のマイクロ規則構造の作製","日本セラミックス協会 2012年年会",,,,,,2012,Mar.