"御宿 希祐,大西哲,TENNETIDEVI,CHAKRABORTYP,町田克之,飯田慎一,小西敏文,曽根正人,三宅美博,伊藤浩之","エッチホールを有するAu錘構造のMEMS加速度センサの減衰定数簡易解析モデルの検討","第83回応用物理学会秋季学術講演会","第83回応用物理学会秋季学術講演会",,"  22a-A406-2",,,2022,Sept.
"御宿 希祐,大西哲,TENNETIDEVI,CHAKRABORTYP,町田克之,飯田慎一,小西敏文,曽根正人,三宅美博,伊藤浩之","Au錘MEMS容量型加速度センサにおける減衰定数簡易解析モデルの検討","第13回集積化MEMS技術研究ワークショップ",,,,,,2022,Aug.
"Kohei Shibata,Akihiro Uchiyama,Akira Onishi,Katsuyuki Machida,Parthojit Chakraborty,Shin-ichi Iida,Toshifumi Konishi,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure",,"IEEE Sensors Journal",,"Vol. 22","Issue 15",,2022,June
"Tso-Fu Mark Chang,Hideaki Nakajima,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Hiroshi Toshiyoshi,Masato Sone","Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers",,"Advances in Microelectronics: Reviews","IFSA PUBLISHING, S.L.","Vol. 3",,,2021,Apr.
"Katsuyuki Machida,Daisuke Yamane,Toshifumi Konishi,Shin-ichi Iida,Noboru Ishihara,Tso-Fu Mark Chang,Masato Sone,Hiroyuki Ito,Kazuya Masu","MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology",,"ECS Transactions",,"Vol. 92",,"pp. 169-184",2019,July
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu","A MEMS Accelerometer for Sub-mG Sensing",,"Sensors and Materials",,"Vol. 31","no. 9","pp. 2883-2894",2019,July
"Hitomi Watanabe,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,,2019,May
"Masato Sone,Hao-Chun Tang,Masaharu Yoshiba,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","Mechanical properties of electrodeposited gold-copper alloy by micro-compression test","The 2nd International Conference on Material Strength and Applied Mechanics","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,2019,May
"Ken Hashigata,Hao-Chun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices",,"Microelectronic Engineering",,"Vol. 213",,"pp. 13-17",2019,May
"Kosuke Suzuki,Ken Hashigata,Keisuke Asano,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,,2019,May
"鈴木 康介,Ken Hashigata,浅野 啓介,Chun-Yi Chen,名越 貴志,Tso-Fu Mark Chang,山根 大輔,小西 敏文,町田 克之,伊藤 浩之,益 一哉,曽根 正人","微小曲げ試験による金材料の機械的強度のサンプル形状効果","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"Chun-Yi Chen,Masaharu Yoshiba,Haochun Tang,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida","Pulse-Current Electrodeposition of Gold",,"Novel Metal Electrodeposition and the Recent Application","IntechOpen",,,,2019,Mar.
"Haochun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida","Electrodeposition of Gold Alloys and the Mechanical Properties",,"Novel Metal Electrodeposition and the Recent Application","IntechOpen",,,,2019,Mar.
"新田 京太朗,Tang Haochun,Chen Chun-Yi,Chang Tso-Fu Mark,山根 大輔,小西 敏文,町田 克之,伊藤 浩之,益 一哉,曽根 正人","電気めっき法によるAu-Cu合金微小カンチレバーの作製","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"渡邊 瞳,鈴木 拓真,Chen Chun-Yi,Chang Tso-Fu Mark,山根 大輔,小西 敏文,町田 克之,伊藤 浩之,益 一哉,曽根 正人","Ti/Au微小カンチレバーの温度依存性への積層構造の影響","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"Tso-Fu Mark Chang,Chun-Yi Chen,Yota Ishizuka,Minami Teranishi,Takuma Suzuki,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors",,"Advances in Microelectronics Reviews","IFSA Publishing","Vol. 2",,"pp. 23-48",2019,Feb.
"Koichiro Tachibana,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test",,"Microelectronic Engineering",,"Volume 207",,"pp. 33-36",2019,Jan.
"Daisuke Yamane,Shota Otobe,Ken Atsumi,Tatsuya Koga,Toshifumi Konishi,Teruaki Safu,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS","32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019)",,,,,"pp. 684-687",2019,Jan.
"Motohiro Takayasu,Ippei Tsuji,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer",,"Sensors and Materials",,"Vol. 30","No. 12","pp. 2919-2926",2018,Dec.
"Shota Otobe,Tatsuya Koga,Ken Atsumi,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shin-ichi Iida,Hiroyuki. Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes","31st International Microprocesses and Nanotechnology Conference (MNC2018)",,,,,,2018,Nov.
"市川 崇志,新島 宏文,古賀 達也,山根 大輔,小西 敏文,佐布 晃昭,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","Au単一錘平行平板型3軸MEMS加速度センサの検討","第35回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）",,,,,,2018,Oct.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Solid Solution Strengthening of Gold Based Materials  for MEMS Applications","The 35th SENSOR SYMPOSIUM on Sensors, Micromachines and Applied Systems",,,,,,2018,Oct.
"乙部 翔太,山根 大輔,小西 敏文,佐布 晃昭,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ","第10回集積化MEMSシンポジウム",,,,,,2018,Oct.
"古賀 達也,山根 大輔,小西 敏文,佐布 晃昭,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討","第35回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）",,,,,,2018,Oct.
"Ken Hashigata,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone.","Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever","IUMRS-ICA 2018","IUMRS-ICA 2018",,,,,2018,Oct.
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone.","Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever","IUMRS-ICA 2018","IUMRS-ICA 2018",,,,,2018,Oct.
"Tso-Fu Mark Chang,Hao-chun Tang,Kyotaro Nitta,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electrodeposition of High Strength Au-Cu Alloys for MEMS Device","2018 International Conference on Solid State Devices and Materials (SSDM2018)","2018 International Conference on Solid State Devices and Materials (SSDM2018)",,,,,2018,Sept.
"Masato Sone,Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu","EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER","8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"","8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"",,,,,2018,Sept.
"中島 英亮,Tso-Fu Mark Chang,Chun-Yi Chen,山根 大輔,小西 敏文,町田 克之,年吉 洋,益 一哉,曽根 正人","MEMS加速度センサに向けた金めっき微小カンチレバーのヤング率 に関する検討","第79回応用物理学会秋季学術講演会","第79回応用物理学会秋季学術講演会",,,,,2018,Sept.
"Hitomi Watanabe,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Takahiro Yamamoto,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys  for Reliability of MEMS Devices","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshib,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu,Masato Sone","Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Ken Hashigata,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Keisuke Asano,Hao-chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Kyotaro Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Kyotaro Nitta,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Masato Sone,Hao-Chun Tang,Chun-yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Kyotaro Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"HIdeaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,HIroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu,Masato Sone","A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Chun-Yi Chen,Hao-Chun Tang,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Shota Otobe,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection","Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018)",,,,,,2018,June
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications",,"Microelectronic Engineering","Elsevier","Vol. 196",,"pp. 20-24",2018,June
"Ken Hashigata,Haochun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","The effect of acid pre-treatment on electroplating of gold on titanium substrate","32nd International Conference on Surface Modification Technologies (SMT32)",,,,,,2018,June
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Kyoutarou Nitta,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"伊藤浩之,山根大輔,小西敏文,道正志郎,石原昇,町田克之,曽根正人,三宅美博,益一哉","MEMS加速度センサと生体計測への応用","新化学技術推進協会 電子情報技術部会 マイクロナノシステムと材料・加工分科会 講演会",,,,,,2018,May
"Kyoutarou Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices","233rd ECS Meeting","233rd ECS Meeting",,,,,2018,May
"Ken Hashigata,Hao-Chun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film","22nd Topical Meeting of the International Society of Electrochemistry",,,,,,2018,Apr.
"Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Toshifumi Konishi,Katsuyuki Machida,Daisuke Yamane,Kazuya Masu,Masato Sone","Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices",,"Microelectronic Engineering",,"Vol. 187-188",,"pp. 105-109",2018,Apr.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shin-ichi Iida,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology","13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018)",,,,,"pp. WM-II-f<sub>3</sub>243",2018,Apr.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys","22nd Topical Meeting of the International Society of Electrochemistry","22nd Topical Meeting of the International Society of Electrochemistry",,,,,2018,Apr.
"中島英亮,Chun-Yi Chen,Tso-Fu Mark Chang,?根?輔,小西敏文,町? 克之,年吉洋,益 ?哉,曽根 正?","電解めっき法によるTi/Au微?カンチレバーのヤング率評価","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"Ken Hashigata,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever for MEMS Accelerometers","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"古賀 達也,高安 基大,山根 大輔,伊藤 浩之,小西 敏文,道正 志郎,石原 昇,町田 克之,益 一哉","積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2)","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"新島 宏文,乙部 翔太,高安 基大,山根 大輔,小西 敏文,佐布 晃昭,伊藤 浩之,年吉 洋,町田 克之,益 一哉","高感度MEMS加速度センサのBrownian Noise評価に関する検討","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"小西 敏文,山根 大輔,佐布 晃昭,陳 君怡,Chang Tso-Fu Mark,伊藤 浩之,道正 志郎,石原 昇,曽根 正人,町田 克之,益 一哉,飯田 慎一","積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"伊藤 浩之,山根 大輔,小西 敏文,道正 志郎,石原 昇,町田 克之,曽根 正人,三宅 美博,益 一哉","集積化CMOS-MEMS技術による高感度慣性センサと応用システム","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"新島 宏文,乙部 翔太,高安 基大,山根 大輔,伊藤 浩之,佐布 晃昭,小西 敏文,道正 志郎,飯田 慎一,石原 昇,町田 克之,益 一哉","単一Au錘3軸差動MEMS加速度センサの検討","平成30年電気学会全国大会",,,,,,2018,Mar.
"高安 基大,古賀 達也,辻 一平,伊藤 浩之,山根 大輔,道正 志郎,小西 敏文,飯田 慎一,石原 昇,町田 克之,益 一哉","傾斜を用いた1mG MEMS加速度センサの分解能評価の検討","平成30年 電気学会 全国大会",,,,,,2018,Mar.
"伊藤 浩之,?根 ?輔,小西敏文,道正 志郎,?原 昇,町? 克之,曽根 正?,三宅 美博,益 ?哉","集積化CMOS-MEMS技術による?感度慣性センサと応?システム","応用物理学会第65回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"Hao-Chun Tang,Ken Hashigata,Tso-Fu Mark Chang,Chun-Yi Chen,Takashi Nagoshi,Toshifumi Konishi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide",,"Surface and Coatings Technology","Elsevier","Vol. 350",,"pp. 1065-1070",2018,Mar.
"TangHao-Chun,Chun-Yi Chen,Tso-Fu Mark Chang,?根?輔,小西敏文,町? 克之,益 ?哉,曽根 正?","電解めっき法によるMEMS??銅合?の作製及び機械的特性評価","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"新? 京太朗,橘 航?朗,TangHao-Chun,Chun-Yi Chen,Tso-Fu Mark Chang,?根 ?輔,小西敏文,町? 克之,益 ?哉,曽根 正?","?期振動試験によるAu-Cu合?微?カンチレバーの構造安定性","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"浅野 啓介,TangHao-Chun,Chun-Yi Chen,名越 貴志,Tso-Fu Mark Chang,?根?輔,小西敏文,町? 克之,益 ?哉,曽根 正?","電析制御による微??カンチレバーの曲げ特性の改善","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices",,"Journal of The Electrochemical Society",,"Vol. 165","No. 2","pp. D58-D63",2018,Jan.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","A 0.18-?m CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers",,"IEICE Electronics Express",,"Vol. 15","no. 2","p. 20171227",2018,Jan.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Strategies of Mechanical Strengthening in Electroplated  Au Materials","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Masato Sone,Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Tso-Fu Mark Chang,Haochun Tang,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology","2017 MRS Fall Meeting",,,,,,2017,Nov.
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology","2017 MRS Fall Meeting",,,,,,2017,Nov.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Chun Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu,Shinichi Iida","Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating","The 30th International Microprocesses and Nanotechnology Conference",,,,,,2017,Nov.
"Hirofumi Niijima,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes","The 30th International Microprocesses and Nanotechnology Conference",,,,,,2017,Nov.
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Sub-1mG Inertial Sensors by Multi-layer Metal Technology","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,"  F5-05",2017,Nov.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Keisuke Asano,Haochun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Ken Hashigata,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components","TACT2017 International Thin Films Conference",,,,,,2017,Oct.
"小西 敏文,山根 大輔,佐布 晃昭,曽根 正人,年吉 洋,益 一哉,町田 克之","積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討","第9回集積化MEMSシンポジウム",,,,,,2017,Oct.
"山根 大輔,小西 敏文,佐布 晃昭,橘 航一朗,寺西 美波,陳 君怡,Tso-Fu Mark Chang,曽根 正人,町田 克之,益 一哉","積層メタルMEMS慣性センサの長期振動特性評価","第9回集積化MEMSシンポジウム",,,,,,2017,Oct.
"辻 一平,高安 基大,伊藤 浩之,山根 大輔,道正 志郎,小西 敏文,石原 昇,町田 克之,益 一哉","積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討","第9回集積化MEMSシンポジウム",,,,,"  01pm1-A-6",2017,Oct.
"新島 宏文,高安 基大,山根 大輔,小西 敏文,佐布 晃昭,伊藤 浩之,年吉 洋,町田 克之,益 一哉","静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)","第34回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,"  01am2-PLN-8",2017,Oct.
"折原 恒祐,高安 基大,道正 志郎,伊藤 浩之,山根 大輔,小西 敏文,石原 昇,町田 克之,益 一哉","発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討","第34回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,"  31am3-PLN-2",2017,Oct.
"古賀 達也,辻 一平,高安 基大,伊藤 浩之,山根 大輔,道正 志郎,小西 敏文,石原 昇,町田 克之,益 一哉","積層メタル技術によるMEMS加速度センサの傾斜時感度特性の検討","第9回 集積化MEMSシンポジウム",,,,,,2017,Oct.
"乙部 翔太,高安 基大,山根 大輔,小西 敏文,佐布 晃昭,伊藤 浩之,道正 志郎,石原 昇,町田 克之,益 一哉","3軸MEMS加速度センサにおける単一Au錘および電極分割方式の検討","第34回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,,2017,Oct.
"高安 基大,道正 志郎,伊藤 浩之,山根 大輔,小西 敏文,町田 克之,石原 昇,益 一哉","MEMS慣性センサ用弛張発振型容量検出回路","第9回 集積化MEMSシンポジウム",,,,,,2017,Oct.
"Shouta Otobe,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes","2017 International Conference on Solid State Devices and Materials (SSDM 2017)",,,,,,2017,Sept.
"Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology","2017 International Conference on Solid State Devices and Materials (SSDM 2017)",,,,,,2017,Sept.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","A capacitive sensor circuit based on relaxation oscillator for sub-1mG MEMS inertial sensors","2017 International Conference on Solid State Devices and Materials (SSDM 2017)",,,,,,2017,Sept.
"山根 大輔,小西 敏文,佐布 晃昭,橘 航一朗,寺西 美波,陳 君怡,Tso-Fu Mark Chang,曽根 正人,町田 克之,益 一哉","金めっきで形成したMEMS加速度センサの長期振動特性に関する検討","第78回 応用物理学会 秋季学術講演会",,,,,,2017,Sept.
"古賀 達也,辻 一平,高安 基大,伊藤 浩之,山根 大輔,道正 志郎,小西 敏文,石原 昇,町田 克之,益 一哉","積層メタル技術によるMEMS慣性センサの傾斜時感度特性の検討","第78回 応用物理学会 秋季学術講演会",,,,,,2017,Sept.
"辻 一平,高安 基大,伊藤 浩之,山根 大輔,道正 志郎,小西 敏文,石原 昇,町田 克之,益 一哉","積層メタル技術を用いた高感度MEMS慣性センサの傾斜計応用の検討","第78回 応用物理学会 秋季学術講演会",,,,,,2017,Sept.
"高安 基大,道正 志郎,伊藤 浩之,山根 大輔,小西 敏文,町田 克之,石原 昇,益 一哉","MEMS加速度センサ用高分解能容量検出回路","第78回 応用物理学会 秋季学術講演会",,,,,,2017,Sept.
"Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Toshifumi Konishi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices",,"Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","IEEE Conference Publications",,,"pp. 264 - 267",2017,Aug.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY",,"Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","IEEE Conference Publications",,,"pp. 2187 - 2190",2017,Aug.
"辻 一平,高安 基大,伊藤 浩之,山根 大輔,小西 敏文,道正 志郎,石原 昇,町田 克之,益 一哉","積層メタル技術を用いた高感度MEMS傾斜計の検討","第8回 集積化MEMS技術研究ワークショップ",,,,,,2017,July
"高安 基大,道正 志郎,伊藤 浩之,山根 大輔,小西 敏文,町田 克之,石原 昇,益 一哉","MEMS加速度センサ用高分解能容量検出回路の評価","第8回 集積化MEMS技術研究ワークショップ",,,,,,2017,July
"曽根 正人,Tso-Fu Mark Chang,Chun-yi Chen,山根 大輔,小西 敏文,町田 克之,益 一哉","非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価","第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー","第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー",,,,,2017,June
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology","The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)",,,,,"pp. 2187-2190",2017,June
"高安 基大,權田 惇晟,小西 敏文,山根 大輔,伊藤 浩之,道正 志郎,石原 昇,町田 克之,益 一哉","人体振動測定のためのMEMS慣性センサを用いたモジュールの検討","LSIとシステムのワークショップ2017",,,,,,2017,May
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices","IEEE-NEMS 2017","IEEE-NEMS 2017",,,,,2017,Apr.
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Masato Sone,Katsuyuki Machida,Yoshihiro Miyake,Kazuya Masu","MEMS inertial sensors for biomedical applications","12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017)",,,,,,2017,Apr.
"中島 英亮,Chang Tso-Fu Mark,陳 君怡,小西 敏文,町田 克之,年吉 洋,山根 大輔,益 一哉,曽根 正人","積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-15",2017,Mar.
"權田 惇晟,高安 基大,山根 大輔,伊藤 浩之,小西 敏文,道正 志郎,石原 昇,町田 克之,益 一哉","移動体制御による慣性センサ評価系の構築","第64回応用物理学会春季学術講演会",,,,,"p. 14p-P3-19",2017,Mar.
"高安 基大,權田 惇晟,山根 大輔,伊藤 浩之,小西 敏文,道正 志郎,石原 昇,町田 克之,益 一哉","積層メタル技術で作製したMEMS慣性センサのモジュール化の検討","第64回 応用物理学会 春季学術講演会",,,,,,2017,Mar.
"飯塚知希,山根 大輔,小西 敏文,伊藤 浩之,石原 昇,町田 克之,益 一哉","振動型エネルギーハーベスティングデバイスのためのSPICE系統合設計の検討","第64回応用物理学会春季学術講演会",,,,,"p. 14p-P3-13",2017,Mar.
"佐布 晃昭,小西 敏文,山根 大輔,年吉 洋,曽根 正人,益 一哉,町田 克之","積層メタル技術による3軸MEMS加速度センサのばね定数設計方法","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-17",2017,Mar.
"小西敏文,山根 大輔,佐布 晃昭,曽根 正人,年吉 洋,益 一哉,町田 克之","積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-16",2017,Mar.
"山根 大輔,小西 敏文,佐布 晃昭,中島 英亮,寺西 美波,陳 君怡,Chang Tso-Fu Mark,曽根 正人,年吉 洋,益 一哉,町田 克之","積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-14",2017,Mar.
"橘 航一朗,Chang Tso-Fu Mark,Chen Chun-Yi,小西 敏文,町田 克之,年吉 洋,山根 大輔,益 一哉,曽根 正人","積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-12",2017,Mar.
"鈴木 拓真,Chang Tso-Fu Mark,Chen Chun-Yi,小西 敏文,町田 克之,年吉 洋,山根 大輔,益 一哉,曽根 正人","積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-11",2017,Mar.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hideaki Nakajima,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu","Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices","29th International Microprocesses and Nanotechnology Conference (MNC 2016)",,,,,"pp. 10D-5-1",2016,Nov.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer",,"Microelectronics Reliability",,"Vol. 66",,"pp. 78-84",2016,Nov.
"小西 敏文,山根大輔,伊藤 浩之,道正 志郎,石原 昇,年吉 洋,益 一哉,町田 克之","マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-007",2016,Oct.
"佐布 晃昭,小西 敏文,山根大輔,年吉 洋,曽根 正人,益 一哉,町田 克之","積層メタル技術によるMEMS加速度センサのばね定数設計方法","第8回集積化MEMSシンポジウム",,,,,"p. 25pm4-PM-008",2016,Oct.
"寺西美波,Chang Tso-Fu Mark,Chen Chun-Yi,山根大輔,益一哉,曽根正人,小西敏文,町田克之,年吉洋","電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"山根大輔,小西 敏文,佐布 晃昭,伊藤 浩之,曽根 正人,年吉 洋,益 一哉,町田 克之","差動型積層メタルMEMS加速度センサの検討","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-003",2016,Oct.
"權田 惇晟,高安 基大,山根 大輔,小西 敏文,伊藤 浩之,道正 志郎,石原 昇,町田 克之,益 一哉","積層メタル技術によるMEMS加速度センサを用いた慣性センサモジュールの検討","集積化MEMSシンポジウム",,,,,"p. 25pm4-PM-006",2016,Oct.
"高安 基大,道正 志郎,伊藤 浩之,石原 昇,山根 大輔,小西 敏文,町田 克之,益 一哉","RC発振器型高感度容量検出回路","第8回 集積化MEMSシンポジウム",,,,,,2016,Oct.
"山根大輔,小西 敏文,佐布 晃昭,曽根 正人,年吉 洋,益 一哉,町田 克之","Sub-1mG検出へ向けた積層メタルMEMS慣性センサ","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-001",2016,Oct.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology","IEEE Sensors 2016","IEEE Proceeding",,,,"pp. 1162-1164",2016,Oct.
"山根大輔,小西 敏文,佐布 晃昭,曽根 正人,年吉 洋,益 一哉,町田 克之","Sub-1mG検出へ向けた積層メタルMEMS慣性センサ","第77回応用物理学会秋季学術講演会",,,,,"pp. 14p-P5-2",2016,Sept.
"小西 敏文,山根大輔,伊藤 浩之,道正 志郎,石原 昇,年吉 洋,益 一哉,町田 克之","CMOS-MEMS慣性センサにおける機械的ノイズの解析手法","第77回応用物理学会秋季学術講演会",,,,,"pp. 14p-P5-1",2016,Sept.
"山根大輔,小西 敏文,佐布 晃昭,伊藤 浩之,道正 志郎,石原 昇,曽根 正人,年吉 洋,益 一哉,町田 克之","積層メタル差動型MEMS加速度センサの基礎検討","第77回応用物理学会秋季学術講演会",,,,,"pp. 14p-P5-3",2016,Sept.
"佐布 晃昭,小西 敏文,山根大輔,年吉 洋,曽根 正人,益 一哉,町田 克之","積層メタル技術によるMEMS加速度センサのばね定数設計方法（I）","第77回応用物理学会秋季学術講演会",,,,,"pp. 15p-B10-8",2016,Sept.
"Toshifumi Konishi,Daisuke Yamane,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Hiroshi Toshiyoshi,Kazuya Masu","A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System","2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)",,,,,"pp. 673-674",2016,Sept.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology","2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)",,,,,"pp. 485-486",2016,Sept.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology","Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016)",,,,,"pp. 299-300",2016,June
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A 1-mG MEMS Sensor","229th ECS Meeting",,,,,,2016,May
"高安 基大,權田 惇晟,山根 大輔,小西 敏文,伊藤 浩之,道正 志郎,石原 昇,町田 克之,益 一哉","小型高感度MEMS慣性センサモジュールの試作評価","LSIとシステムのワークショップ2016",,,,,,2016,May
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A 1-mG MEMS Sensor",,"ECS Transactions",,"vol. 72","no. 3","pp. 7-14",2016,May
"Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Masakazu Sonobe,Takumi Kobayashi,Yamato Fukuta,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Kazuya Masu,Katsuyuki Machida","A study of railroad vehicle control by inertial sensors","11th World Congress on Railway Research (11th WCRR)",,,,,,2016,May
"Yota Ishizuka,Sari Yanagida,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Electroplated Gold Materials with Enhanced Mechanical Strength by Multi-Layered Structure","ISE - Topical Meeting","ISE - Topical Meeting",,,,,2016,Apr.
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers",,"Microelectronics Engineering",,"Vol. 153",,"pp. 90-93",2016,Apr.
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Mechanical Characteristics of Structure Stability with Ti/Au Micro-Cantilevers Formed by Au Electroplating","ISE - Topical Meeting","ISE - Topical Meeting",,,,,2016,Apr.
"山根大輔,小西敏文,伊藤浩之,年吉 洋,益 一哉,町田克之","Sub-1G 検出へ向けた CMOS-MEMS 加速度センサの検討","第63回応用物理学会春季学術講演会",,,,,"pp. 21p-P17-18",2016,Mar.
"リュウ アンキ,小西 敏文,山根 大輔,伊藤 浩之,道正 志郎,石原 昇,町田 克之,益 一哉","CMOS低雑音オペアンプ設計法の検討","電子情報通信学会2016年総合大会",,,,,"pp. C-12-13",2016,Mar.
"山根大輔,小西敏文,年吉 洋,益 一哉,町田克之","Sub-1G検出へ向けた積層メタル3軸加速度センサの基礎検討","電子情報通信学会2016年総合大会",,,,,"pp. C-10-16",2016,Mar.
"小西敏文,山根大輔,佐布晃昭,年吉 洋,曽根正人,益 一哉,町田克之","積層メタル構造を用いた MEMS 加速度センサのストッパーのロバスト性検討","第63回応用物理学会春季学術講演会",,,,,"pp. 21p-P17-17",2016,Mar.
"寺西 美波,TSO-FU MARK CHANG,陳 君怡,小西 敏文,町田 克之,年吉 洋,山根 大輔,益 一哉,曽根 正人","電解金めっきで作製したTi/Au微小カンチレバーの構造安定性","第63回応用物理学会春季学術講演会","第63回応用物理学会春季学術講演会",,,,,2016,Mar.
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology","IEEE Inertial Sensors 2016",,,,,"pp. 148-149",2016,Feb.
"Daisuke Yamane,Toshifumi Konishi,Motohiro Takayasu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Sub-1G CMOS-MEMS Accelerometer","IEEE Sensors 2015",,,,,"pp. 513-516",2015,Nov.
"佐布 晃昭,小西敏文,松島隆明,山根大輔,年吉 洋,曽根正人,益 一哉,町田克之","MEMS加速度センサのための金属構造体の密着力評価","第7回集積化MEMSシンポジウム",,,,,"pp. 29pm3-PM-5",2015,Oct.
"山根大輔,小西敏文,年吉 洋,益 一哉,町田克之","Sub-1G?20G集積化MEMS慣性センサ","第7回集積化MEMSシンポジウム",,,,,"pp. 29pm3-PM-2",2015,Oct.
"高安 基大,山根 大輔,小西 敏文,伊藤 浩之,道正 志郎,石原 昇,年吉 洋,益 一哉,町田 克之","移動体制御における慣性センサ適用性の検討","第7回 集積化MEMSシンポジウム",,,,,,2015,Oct.
"小西敏文,山根大輔,高安基大,伊藤浩之,道正志郎,石原昇,益 一哉,年吉 洋,町田克之","マルチフィジクスシミュレーションを用いたCMOS-MEMS 加速度センサのためのゲイン制御センサ回路の検討","第7回集積化MEMSシンポジウム",,,,,"pp. 29pm2-D-4",2015,Oct.
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices","SSDM2015, 2015 International Conference on Solid State Devises and Materials","SSDM2015, 2015 International Conference on Solid State Devises and Materials",,,,"pp. 52-53",2015,Sept.
"Daisuke Yamane,Toshifumi Konishi,Motohiro Takayasu,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology","SSDM2015, 2015 International Conference on Solod State Devices and Materials","SSDM2015, 2015 International Conference on Solod State Devices and Materials",,,,"pp. 786-787",2015,Sept.
"佐布晃昭,小西敏文,松島隆明,山根大輔,年吉 洋,曽根正人,益 一哉,町田克之","MEMS加速度センサのための金属構造体の密着力評価","第76回応用物理学会秋季学術講演会",,,,,"pp. 15a-PB4-3",2015,Sept.
"小西敏文,山根大輔,高安基大,伊藤浩之,道正志郎,石原昇,益 一哉,年吉 洋,町田克之","ゲイン制御型CMOS-MEMS加速度センサ回路の検討","第76回応用物理学会秋季学術講演会",,,,,"pp. 15a-PB4-2",2015,Sept.
"山根大輔,小西敏文,年吉 洋,益 一哉,町田克之","Sub-1G?20G集積化MEMS加速度センサの基本評価","第76回応用物理学会秋季学術講演会",,,,,"pp. 15a-PB4-3",2015,Sept.
"Daisuke Yamane,Toshifumi Konishi,Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Hiroshi Toshiyoshi,Kazuya Masu,Masato Sone,Katsuyuki Machida","A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology","25th Advanced Metallization Conference Asian Session (ADMETAplus2015)",,,,,,2015,Sept.
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology","41st Micro and Nano Engineering (MNE2015)",,,,,"pp. Wed-C-p11",2015,Sept.
"Toshifumi Konishi,Daisuke Yamane,Motohiro Takayasu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Kazuya Masu,Hiroshi Toshiyoshi,Katsuyuki Machida","Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer","2015 International Conference on Solid State Devices and Materials (SSDM 2015)",,,,,"pp. 798-799",2015,Sept.
"Daisuke Yamane,Toshifumi Konishi,Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Hiroshi Toshiyoshi,Kazuya Masu,Masato Sone,Katsuyuki Machida","A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology","AMC2015, Advanced Metallization Conference","AMC2015",,,,,2015,Sept.
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers","MNE2015, The 41th International Conference on Micro and Nano Engineering","MNE2015, The 41th International Conference on Micro and Nano Engineering",,,,"pp. Wed-C-p81",2015,Sept.
"Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","Nano-G metrology system and its biomedical applications by CMOS-MEMS technology","3rd Int'l Conf. on Integrative Biology","Biological Systems: Open Access","OMICS International Conferences","Volume 4",,"pp. 87",2015,Aug.
"高安 基大,山根 大輔,小西 敏文,伊藤 浩之,道正 志郎,石原 昇,年吉 洋,益 一哉,町田 克之","MEMS慣性センサを用いた移動体制御の検討","第6回 集積化MEMS技術研究ワークショップ",,,,,,2015,July
"高安 基大,山根 大輔,小西 敏文,亀井 将太,伊藤 浩之,道正 志郎,石原 昇,年吉 洋,益 一哉,町田 克之","慣性センサを用いた移動体制御の基礎検討","平成27年 電気学会 センサ・マイクロマシン部門総合研究会",,,,,,2015,July
"寺西美波,Chang Tso-Fu Mark,山根大輔,小西敏文,松島隆明,伊藤浩之,年吉 洋,町田克之,益 一哉,曽根正人","電解金めっきで作製した微小カンチレバーの形状安定性評価","平成27年電気学会センサ・マイクロマシン部門総合研究会",,,,,"pp. 15-18",2015,July
"寺西美波,Tso-Fu Mark Chang,小西敏文,松島隆明,町田克之,年吉 洋,山根大輔,伊藤浩之,益 一哉,曽根正人","電解金めっきで作製したMEMSデバイスにおける動作構造安定性","応用物理学会集積化MEMS技術研究会 第6回集積化MEMS技術研究ワークショップ",,,,,"p. 7",2015,July
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A 0.1G-to-20G Integrated MEMS Inertial Sensor",,"Japanese Journal of Applied Physics","The Japan Society of Applied Physics","Volume 54","Number 8","pp. 087202.1-087202.4",2015,July
"Minami Teranishi,Tso-Fu Mark Chang,Toshifumi Konishi,Masaki Yano,Katsuyuki Machida,Daisuke Yamane,Hiroyuki Ito,Kazuya Masu,Tatsuo Sato,Masato Sone","Stability of Movable Structure Formed by Au Electroplating for MEMS Devices","ICMAT2015 & IUMRS-ICA2015,","ICMAT2015 & IUMRS-ICA2015,",,,,,2015,June
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Sub-1G MEMS Sensor","the 227th ECS Meeting",,,,,"pp. 1332",2015,May
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Sub-1G MEMS Sensor",,"ECS Transactions","The Electrochemical Society","volume 66","No. 5","pp. 131-138",2015,May
"Daisuke Yamane,Takaaki Matsushima,Toshifumi Konishi,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass",,"Microsystem Technologies","Springer Berlin Heidelberg","Vol. 22",,"pp. 459-464",2015,Apr.
"Katsuyuki Machida,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Kazuya Masu","CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-","2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC 2015)",,,,,"pp. 201",2015,Apr.
"山根 大輔,小西 敏文,松島 隆明,亀井 将太,益 一哉,町田 克之","高感度静電容量型センサにおけるBrownian Noise評価手法",,"電気学会論文誌E（センサ・マイクロマシン部門誌）","一般社団法人 電気学会","vol. 135","no. 4","pp. 142-143",2015,Apr.
"山根大輔,小西敏文,松島隆明,年吉 洋,町田克之,益 一哉","Sub-1G検出可能な3軸MEMS加速度センサの基礎検討","平成27年電気学会全国大会",,,,,,2015,Mar.
"小西敏文,山根大輔,松島隆明,益 一哉,年吉 洋,町田克之","エネルギーハーべスティングデバイスの検討（5）","第62回応用物理学会春季学術講演会",,,,,"p. 12-125",2015,Mar.
"山根大輔,小西敏文,松島隆明,年吉 洋,町田克之,益 一哉","Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討","第62回応用物理学会春季学術講演会",,,,,"p. 17-189",2015,Mar.
"Takaaki Matsushima,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology","27th Int. Microprocesses and Nanotechnology Conference (MNC 2014)",,,,,"pp. 6C-5-5",2014,Nov.
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A 1mG-to-20G Integrated MEMS Inertial Sensor","IEEE SENSORS 2014",,,,,"pp. 1591-1594",2014,Nov.
"松島隆明,山根大輔,小西敏文,年吉洋,益 一哉,町田克之","Ａｕ積層形成技術による３軸ＭＥＭＳ加速度センサの検討","第６回集積化ＭＥＭＳシンポジウム",,,,,,2014,Oct.
"山根大輔,小西敏文,松島隆明,年吉 洋,益 一哉,町田克之","集積化ＣＭＯＳ?ＭＥＭＳ技術によるＳｕｂ-１Ｇ加速度センサの基礎検討","第６回集積化ＭＥＭＳシンポジウム",,,,,,2014,Oct.
"小西敏文,松島隆明,山根大輔,益 一哉,年吉洋,町田克之","回路シミュレータを用いたＭＥＭＳエネルギーハーベスティングデバイスの検討","第６回集積化ＭＥＭＳシンポジウム",,,,,,2014,Oct.
"山根大輔,小西敏文,松島隆明,亀井将太,益 一哉,町田克之","高感度静電容量型センサにおけるブラウニアン・ノイズ評価の検討","第６回集積化ＭＥＭＳシンポジウム",,,,,,2014,Oct.
"亀井将太,山根大輔,小西敏文,松島隆明,年吉 洋,町田克之,益 一哉","集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討","第７５回応用物理学会秋季学術講演会",,,,,"pp. 13-065",2014,Sept.
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers","International Conference on Solid State Devices and Materials",,,,,"p. 974-975",2014,Sept.
"小西敏文,山根大輔,松島隆明,益 一哉,年吉 洋,町田克之","エネルギーハーべスティングデバイスの検討（４）","第７５回応用物理学会秋季学術講演会",,,,,"pp. 13-067",2014,Sept.
"松島隆明,小西敏文,山根大輔,年吉 洋,益 一哉,町田克之","積層メタル構造による３軸加速度センサの検討","第７５回応用物理学会秋季学術講演会",,,,,"pp. 13-066",2014,Sept.
"Toshifumi Konishi,Takaaki Matsushima,Daisuke Yamane,Kazuya Masu,Hiroshi Toshiyoshi,Katsuyuki Machida","A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator","International Conference on Solid State Devices and Materials",,,,,"p. 100-101",2014,Sept.
"山根大輔,亀井将太,小西敏文,松島隆明,年吉 洋,益 一哉,町田克之","集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ","応用物理学会集積化ＭＥＭＳ技術研究会 第５回集積化ＭＥＭＳ技術研究ワークショップ",,,,,"pp. P4",2014,July
"小西敏文,山根大輔,松島隆明,益 一哉,年吉 洋,町田克之","マルチフィジックスシミュレータを用いたCMOS-MEMS加速度センサの検討","応用物理学会集積化ＭＥＭＳ技術研究会 第５回集積化ＭＥＭＳ技術研究ワークショップ",,,,,"pp. P7",2014,July
"松島隆明,小西敏文,山根大輔,亀井将太,年吉 洋,益 一哉,町田克之","積層メタルによる静電容量型3軸加速度センサの基礎検討","応用物理学会集積化ＭＥＭＳ技術研究会 第５回集積化ＭＥＭＳ技術研究ワークショップ",,,,,"pp. P5",2014,July
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers","7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014)",,,,,"pp. P2-55",2014,June
"Yusuke Shiino,Hiroyuki Ito,Taku Fujiwara,Noboru Ishihara,Hisashi Yamanouchi,Hiroki Tanabe,Satoshi Nomura,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","An Ultra Low Power pH-Monitoring IC with a Duty-Cycling Wireless FM-Transmitter","The 2014 IEEE International Symposium on Circuits and Systems (ISCAS)",,,,,,2014,June
"山根大輔,松島隆明,小西敏文,年吉 洋,町田克之,益 一哉","集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討","平成２６年電気学会センサ・マイクロマシン部門総合研究会",,,,,"pp. MSS-14-002",2014,May
"Katsuyuki Machida,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Kazuya Masu","Integrated CMOS-MEMS Technology and Its Applications",,"ECS Transactions","The Electrochemical Society","volume 61","no. 6","pp. 21-39",2014,May
"Katsuyuki Machida,Toshifumi Konishi,Daisuke Yamane,Hiroshi Toshiyoshi,Kazuya Masu","Integrated CMOS-MEMS Technology and its Application","The 2nd Int. Symp. on More-than-Moore, the 225th Meeting of the Electrochemical Society",,,,,,2014,May
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer","2014 IEEE International Interconnect Technology Conference/Advanced Metallization Conference  (IITC/AMC 2014)",,,,,"pp. 113-116",2014,May
"Daisuke Yamane,Takaaki Matsushima,Toshifumi Konishi,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer","Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014)",,,,,"pp. 69-72",2014,Apr.
"伊藤浩之,小西敏文,松島隆明,山根大輔,石原 昇,町田克之,益 一哉","RF受信機のためのアレイ型MEMS共振器ミキサの検討","第６１回応用物理学会春季学術講演会",,,,,,2014,Mar.
"松島隆明,小西敏文,山根大輔,伊藤浩之,石原 昇,年吉 洋,町田克之,益 一哉","アレイ型ＭＥＭＳ加速度センサ-２軸ＭＥＭＳ加速度センサの検討-","第６１回応用物理学会春季学術講演会",,,,,,2014,Mar.
"山根大輔,小西敏文,松島隆明,伊藤浩之,石原 昇,年吉 洋,町田克之,益 一哉","Sub-1G MEMS加速度センサの検討","第６１回応用物理学会春季学術講演会",,,,,,2014,Mar.
"Toshifumi Konishi,Daisuke Yamane,Takaaki Matsushima,Kazuya Masu,Katsuyuki Machida,Hiroshi Toshiyoshi","A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology",,"Japanese Journal of Applied Physics",,"vol. 53",,"pp. 04EE15.1-7",2014,Mar.
"山根大輔,小西敏文,松島隆明,年吉 洋,町田克之,益 一哉","MEMS加速度センサによるSub-1G検出の基礎検討","平成２６年電気学会全国大会",,,,,,2014,Mar.
"加賀谷 賢,小西敏文,山根大輔,松島隆明,伊藤浩之,石原 昇,年吉 洋,町田克之,益 一哉","エネルギーハーベスティングデバイスの検討（２）","第６１回応用物理学会春季学術講演会",,,,,,2014,Mar.
"小西敏文,加賀谷 賢,山根大輔,松島隆明,伊藤浩之,石原 昇,益 一哉,町田克之,年吉 洋","エネルギーハーベスティングデバイスの検討（３）","第６１回応用物理学会春季学術講演会",,,,,,2014,Mar.
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Katsuyuki Machida,Hiroshi Toshiyoshi,Kazuya Masu","Design of sub-1g microelectromechanical systems accelerometers",,"Applied Physics Letters",,"Vol. 104","No. 7","pp. 74102",2014,Feb.
"Toshifumi Konishi,Daisuke Yamane,Takaaki Matsushima,Kazuya Masu,Katsuyuki Machida,Hiroshi Toshiyoshi","An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology",,"Japanese Journal of Applied Physics",,"Vol. 53",,"pp. 27202",2014,Jan.
"伊藤浩之,小西敏文,山根大輔,石原 昇,町田克之,益 一哉","ミキサファーストRF 受信機のためのMEMS 共振器ミキサの検討","応用物理学会集積化ＭＥＭＳ技術研究会 第５回集積化ＭＥＭＳシンポジウム",,,,,"pp. 7AM2-E-8",2013,Nov.
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Gou Motohashi,Ken Kagaya,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Sub-1G MEMS Accelerometer","IEEE SENSORS 2013",,,,,"pp. 171-174",2013,Nov.
"山根大輔,小西敏文,松島隆明,加賀谷 賢,佃 真文,伊藤浩之,石原 昇,年吉 洋,町田克之,益 一哉","アレイ型ＭＥＭＳ加速度センサの特性評価","応用物理学会集積化ＭＥＭＳ技術研究会 第５回集積化ＭＥＭＳシンポジウム",,,,,"pp. 6PM3-PIM-002",2013,Nov.
"小西敏文,山根大輔,松島隆明,丸山智史,加賀谷 賢,伊藤浩之,石原 昇,年吉 洋,町田克之,益 一哉","マルチフィジクスシミュレーションを用いた集積化CMOS-MEMS技術のためのセンサ回路の検討","応用物理学会集積化ＭＥＭＳ技術研究会 第５回集積化ＭＥＭＳシンポジウム",,,,,"pp. 6PM3-PIM-001",2013,Nov.
"加賀谷 賢,小西敏文,山根大輔,松島隆明,佃 真文,伊藤浩之,石原 昇,年吉 洋,町田克之,益 一哉","エネルギーハーベストデバイスの小型化の検討","応用物理学会集積化ＭＥＭＳ技術研究会 第５回集積化ＭＥＭＳシンポジウム",,,,,"pp. 6PM3-PIM-003",2013,Nov.
"小西敏文,山根大輔,松島隆明,町田克之,益 一哉,年吉 洋","CMOSとMEMS集積のためのシミュレーション解析-集積化CMOS-MEMSデバイス実現に向けて-","電子情報通信学会 シリコン・フォトニクス研究会",,,,,"  SIPH2013-99",2013,Oct.
"山根大輔,小西敏文,松島隆明,加賀谷 賢,佃 真文,伊藤浩之,石原 昇,年吉 洋,町田克之,益 一哉","アレイ型ＭＥＭＳ加速度センサの基本特性評価","第７４回応用物理学会秋季学術講演会・半導体A（ＭＥＭＳ、ＮＥＭＳの基礎と応用：異種機能集積化）",,,,,"pp. 18p-P11-4",2013,Sept.
"Toshifumi Konishi,Daisuke Yamane,Takaaki Matsushima,Satoshi Maruyama,Ken Kagaya,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology","2013 Int. Conf. on Solid State Devices and Materials (SSDM 2013)",,,,,"pp. G-4-2",2013,Sept.
"加賀谷 賢,小西敏文,山根大輔,松島隆明,佃 真文,伊藤浩之,石原 昇,年吉 洋,町田克之,益 一哉","エネルギーハーベストデバイスの検討(1)","第７４回応用物理学会秋季学術講演会",,,,,"pp. 18p-P11-5",2013,Sept.
"小西敏文,山根大輔,松島隆明,丸山智史,加賀谷 賢,伊藤浩之,石原 昇,年吉 洋,町田克之,益 一哉","集積化CMOS-MEMS加速度センサ回路の検討","第７４回応用物理学会秋季学術講演会・半導体A（ＭＥＭＳ、ＮＥＭＳの基礎と応用：異種機能集積化）",,,,,"pp. 18p-P11-3",2013,Sept.
"椎野雄介,藤原琢,伊藤浩之,石原昇,山内悠,田邉裕貴,野村聡,小西敏文,町田克之,益一哉","ISFETを用いたワイヤレスpHモニタリング用低電力FM送信IC","電子情報通信学会2013ソサイエティ大会",,,,,"  C-12-24",2013,Sept.
"佃 真文,山根大輔,小西敏文,松島隆明,加賀谷 賢,伊藤浩之,石原 昇,年吉 洋,町田克之,益 一哉","アレイ型ＭＥＭＳ加速度センサの基礎検討","平成２５年度電気学会センサ・マイクロマシン部門 マイクロマシン・センサシステム研究会",,,,,"pp. MSS-13-001",2013,Aug.
"小西敏文,丸山智史,山根大輔,松島隆明,町田克之,益 一哉,年吉 洋","回路シミュレータを用いた集積化CMOS-MEMSのための統合設計環境の構築","応用物理学会集積化ＭＥＭＳ技術研究会 第４回集積化ＭＥＭＳ技術研究ワークショップ",,,,,,2013,July
"山根大輔,小西敏文,松島隆明,加賀谷 賢,佃 真文,伊藤浩之,石原 昇,年吉 洋,町田克之,益 一哉","金メッキ集積化CMOS-MEMSによるアレイ型加速度センサの小型化","応用物理学会集積化ＭＥＭＳ技術研究会 第４回集積化ＭＥＭＳ技術研究ワークショップ",,,,,,2013,July
"Daisuke Yamane,Toshifumi Konishi,Takaaki Matsushima,Gou Motohashi,Ken Kagaya,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION","17th Int. Conf on Solid-State Sensors, Actuators and Microsystems (Transducers 2013)",,,,,"pp. 22-25",2013,June
"Toshifumi Konishi,Daisuke Yamane,Takaaki Matsushima,Gou Motohashi,Ken Kagaya,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Novel Sensor Structure and its Evaluation for Integratd Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer",,"Japanese Journal of Applied Physics",,"Vol. 52","No. 6","pp. 06GL04",2013,June
"小西敏文,山根大輔,本橋 剛,加賀谷 賢,松島隆明,伊藤浩之,石原 昇,年吉 洋,町田克之,益一哉","アレイ型ＭＥＭＳ加速度センサの設計","第６０回応用物理学会春季学術講演会・合同セッションＬ（ＭＥＭＳ、ＮＥＭＳの基礎と応用：異種機能集積化）",,,,,,2013,Mar.
"山根大輔,小西敏文,松島隆明,本橋 剛,加賀谷 賢,伊藤浩之,石原 昇,年吉 洋,町田克之,益一哉","アレイ型ＭＥＭＳ加速度センサの検討","第６０回応用物理学会春季学術講演会・合同セッションＬ（ＭＥＭＳ、ＮＥＭＳの基礎と応用：異種機能集積化）",,,,,,2013,Mar.
"椎野雄介,藤原琢,伊藤浩之,石原昇,山内 悠,田邉裕貴,野村聡,小西敏文,町田克之,益一哉","ISFETを用いたpHモニタリング用低電力FM送信ICの検討","電子情報通信学会2013総合大会, エレクトロニクスソサイエティ",,,,,,2013,Mar.
"町田克之,小西敏文,山根大輔,年吉洋,益一哉","集積化CMOS-MEMS技術の検討","平成25年度電気学会全国大会・シンポジウム（S24）ワイヤレス通信応用RF-MEMS技術",,,,,,2013,Mar.
"加賀谷 賢,小西敏文,山根大輔,本橋 剛,松島隆明,伊藤浩之,石原 昇,年吉 洋,町田克之,益一哉","アレイ型ＣＭＯＳ-ＭＥＭＳ加速度センサのためのデバイスの評価","第６０回応用物理学会春季学術講演会・合同セッションＬ（ＭＥＭＳ、ＮＥＭＳの基礎と応用：異種機能集積化）",,,,,,2013,Mar.
"Toshifumi Konishi,Katsuyuki Machida,Satoshi Maruyama,Makoto Mita,Kazuya Masu,Hiroshi Toshiyoshi","A Single-platform Simulation and Design Technique for CMOS-MEMS Based on a Circuit Simulator with Hardware Description Language",,"IEEE/ASME Journal of Microelectromechanical Systems",,"vol. 22","no. 3","pp. 755-767",2013,
"Hiroshi Toshiyoshi,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","A Mixed-Design Technique for Integrated MEMS using a Circuit Simulator with HDL","Mixed Design of Integrated Circuits and Systems (MIXDES 2013)",,,,,,2013,
"Hiroshi Toshiyoshi,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","A Multi-Physics Simulation Technique for Integrated MEMS","2012 IEEE International Electron Devices Meeting (IEDM 2012)",,,,,,2012,Dec.
"Kazuya Masu,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi","How can we bridge the gap between photonics and Si CMOS LSI?","The 2nd International Symposium on Photonics and Electronics Convergence -Advanced Nanophotonics and Silicon Device Systems-(ISPEC 2012)",,,,,"pp. E-2",2012,Dec.
"加賀谷 賢,小西敏文,山根大輔,伊藤浩之,石原 昇,年吉 洋,町田克之,益一哉","統合設計技術のためのMEMS加速度センサのモデルの検討","応用物理学会・集積化MEMS技術研究会主催第4回集積化MEMSシンポジウム",,,,,,2012,Oct.
"Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Hiroshi Toshiyoshi","Multi-Physics Equivalent Circuit Model for MEMS Sensors and Actuators",,"ECS Transactions","The Electrochemical Society","volume 50","no. 14","pp. 55-61",2012,Oct.
"Daisuke Yamane,Takaaki Matsushima,Toshifumi Konishi,Gou Motohashi,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers","25th Int. Microprocesses and Nanotechnology Conference (MNC 2012)",,,,,,2012,Oct.
"Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Hiroshi Toshiyoshi","Multi-physics Equivalent Circuit Models for MEMS Sensors and Actuators","The 1st Int. Symp. on More-than-Moore, the 222nd Meeting of the Electrochemical Society / The 2012 Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME)",,,,,,2012,Oct.
"山根大輔,本橋 剛,小西敏文,松島隆明,伊藤浩之,石原 昇,年吉 洋,町田克之,益一哉","アレイ型CMOS-MEMS加速度センサのためのデバイスの検討","応用物理学会・集積化MEMS技術研究会主催第4回集積化MEMSシンポジウム",,,,,,2012,Oct.
"伊藤浩之,山根大輔,小西敏文,石原 昇,町田克之,益一哉","RFミキサ回路のため高速MEMSスイッチの検討","応用物理学会・集積化MEMS技術研究会主催第4回集積化MEMSシンポジウム",,,,,,2012,Oct.
"小西敏文,丸山智史,三田信,山根大輔,伊藤浩之,町田克之,石原 昇,益一哉,藤田博之,年吉 洋","ハードウェア記述言語を用いた集積化CMOS-MEMS統合設計技術","応用物理学会・集積化MEMS技術研究会主催第4回集積化MEMSシンポジウム",,,,,,2012,Oct.
"本橋 剛,小西敏文,松島隆明,山根大輔,伊藤浩之,石原 昇,年吉 洋,町田克之,益一哉","0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討","応用物理学会・集積化MEMS技術研究会主催第4回集積化MEMSシンポジウム",,,,,,2012,Oct.
"松島 隆明,小西 敏文,本橋 剛,山根 大輔,伊藤 浩之,石原 昇,年吉 洋,町田 克之,益 一哉","アレイ型CMOS-MEMS加速度センサの検討（3）","２０１２年秋期第７３会応用物理学会学術講演会",,,,,,2012,Sept.
"Daisuke Yamane,Takaaki Matsushima,Toshifumi Konishi,Gou Motohashi,Hiroyuki Ito,Noboru Ishihara,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer","2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012)",,,,,,2012,Sept.
"Toshifumi Konishi,Satoshi Maruyama,Makoto Mita,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu,Hiroyuki Fujita,Hiroshi Toshiyoshi","A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language","2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012)",,,,,,2012,Sept.
"本橋 剛,小西 敏文,松島 隆明,山根 大輔,伊藤 浩之,石原 昇,年吉 洋,町田 克之,益一哉","アレイ型CMOS-MEMS加速度センサの検討（4）","２０１２年秋期第７３会応用物理学会学術講演会",,,,,,2012,Sept.
"山根大輔,本橋 剛,小西敏文,松島隆明,伊藤浩之,石原 昇,年吉 洋,町田克之,益一哉","アレイ型CMOS-MEMS加速度センサの検討","応用物理学会・集積化MEMS技術研究会主催 第3回集積化MEMS技術研究ワークショップ",,,,,,2012,July
"山根大輔,本橋剛,小西敏文,松島隆明,伊藤浩之,石原昇,年吉洋,町田克之,益一哉","アレイ型CMOS-MEMS加速度センサの検討",,,,,,,2012,July
"本橋剛,小西敏文,松島隆明,伊藤浩之,石原昇,年吉洋,町田克之,益一哉","アレイ型CMOS-MEMS 加速度センサの検討(1)","第59 回応用物理学関係連合講演会","第59 回応用物理学関係連合講演会 講演予稿集","応用物理学会",,,"pp. 22-019",2012,Mar.
"小西敏文,本橋剛,松島隆明,伊藤浩之,石原昇,年吉洋,町田克之,益一哉","アレイ型CMOS-MEMS 加速度センサの検討 (2)","第59 回応用物理学関係連合講演会","第59 回応用物理学関係連合講演会 講演予稿集","応用物理学会",,,"pp. 22-020",2012,Mar.
"本橋 剛,小西敏文,松島隆明,山根大輔,伊藤浩之,益一哉,町田克之","0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討",,,,,,,2012,
"小西 敏文,丸山 智史,松島 隆明,三田 信,町田 克之,伊藤 浩之,石原 昇,益一哉,藤田 博之,年吉 洋","集積化 CMOSCMOS--MEMSMEMS のための統合設計技術統合設計技術の検討 (2)","第 72 回応用物理学会学術講演会","第 72 回応用物理学会学術講演会 講演予稿集(2011 秋 山形大学) 30a-E-14","応用物理学会",,,"p. 22-014",2011,Aug.
"藤原 琢,石原 昇,天川 修平,山之内 悠,田邉 裕貴,野村 聡,小西 敏文,町田 克之,益 一哉","ISFET を用いた小型低電力ワイヤレス pH センサモジュール","応用物理学会集積化 MEMS 技術研究会主催 集積化 MEMS シン ポジウ ム 2010","応用物理学会集積化 MEMS 技術研究会主催 集積化 MEMS シン ポジウ ム 2010","応用物理学会集積化 MEMS 技術研究会主催 集積化 MEMS シン ポジウ ム 2010",,,"pp. 19-22",2010,Oct.
"藤原 琢,石原 昇,天川 修平,山内 悠,田邉 裕貴,野村 聡,小西 敏文,町田 克之,益 一哉","ISFETを用いたワイヤレスpHセンシング用低電力FM送信IC","2010 年電子情報通信学会エレクトロニクスソサイエティ大会","2010 年電子情報通信学会エレクトロニクスソサイエティ大会","2010 年電子情報通信学会エレクトロニクスソサイエティ大会",,,"pp. 111",2010,Sept.
"Toshifumi Konishi,Satoshi Maruyama,Takaaki Matsushima,Makoto Mita,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu,Hiroyuki Fujita,Hiroshi Toshiyoshi","A SPICE-based Multi-physics Seamless Simulation Platform for CMOS-MEMS","2010 International Conference on Solid State Devices and Materials","Extended Abstracts of the 2010 International Conference on Solid State Devices and Materials","2010 International Conference on Solid State Devices and Materials",,,"pp. 1158-1159",2010,Sept.
"Taku Fujiwara,Noboru Ishihara,Shuhei Amakawa,Hisashi Yamauchi,Hiroki Tanabe,Satoshi Nomura,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","A Wearably Small Low-Power Wireless pH Sensor Module Incorporating an lon-sensitive Field-Effect Transtor","The 13th International Meeting on Chemical Sensors (IMCS-13)","The 13th International Meeting on Chemical Sensors (IMCS-13)","The 13th International Meeting on Chemical Sensors (IMCS-13)",,,"p. 378",2010,July