"Y. Takamura,H. Nitta,K. Kawahara,T. Kaneko,R. Ishido,T. Miyazaki,N. Hosoda,K. Fujisaki,S. Nakagawa","Fabrication of CoFeB?SiO2 Films With Large Uniaxial Anisotropy by Facing Target Sputtering and its Application to High-Frequency Planar-Type Spiral Inductors",,"IEEE Transactions on Magnetics","IEEE","Vol. 59","Issue 11","pp. 1-4",2023,July "Y. Takamura,H. Nitta,K. Kawahara,T. Kaneko,R. Ishido,T. Miyazaki,N. Hosoda,K. Fujisaki,S. Nakagawa","Fabrication of CoFeB-SiO2 films with large uniaxial anisotropic by facing target sputtering and its application to high frequency planar type spiral inductors","Intermag2023","Intermag 2023 Digest Book",," MOA-05",,,2023,May "m“c”¿“ì,‹àŽq’‰K,‰ÍŒ´˜a”n,Ό˗º—S,‹{?’B–ç,דc®Šö,“¡?Œh‰î,’†ì–ÎŽ÷,‚‘º—z‘¾","‘ÎŒüƒ^[ƒQƒbƒgŽ®ƒXƒpƒbƒ^‚Å컂µ‚½CoFeB-SiO2”––Œ‚ð—p‚¢‚½’·•ûŒ`ƒXƒpƒCƒ‰ƒ‹ƒCƒ“ƒ_ƒNƒ^","—ߘa5”N“d‹CŠw‰ï‘S‘‘å‰ï",,," 2-095",,,2023,Mar. "‰ÍŒ´˜a”n,‹àŽq’‰K,ˆÀ“c’q‹M,’I£ƒ•½,‚‘º—z‘¾,“¡èŒh‰î,’†ì–ÎŽ÷","‘ÎŒüƒ^[ƒQƒbƒgŽ®ƒXƒpƒbƒ^–@‚É‚æ‚é‚Žü”g“®ì—pCoZrO ”––Œ‚Ìì»","‘æ45‰ñ“ú–{Ž¥‹CŠw‰ïŠwpu‰‰‰ï","‘æ45 ‰ñ“ú–{Ž¥‹CŠw‰ïŠwpu‰‰ŠT—vW",," 02pC-4",,,2021,Sept.