"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hideaki Nakajima,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu","Young�fs modulus evaluation of electroplated Ti/Au structures for MEMS devices","29th International Microprocesses and Nanotechnology Conference (MNC 2016)",,,,,"pp. 10D-5-1",2016,Nov.