"Kazuya Masu,Katsuyuki Machida,Daisuke Yamane,Hiroyuki Ito,Noboru Ishihara,Tso-Fu Mark Chang,Masato Sone,Ryo Shigeyama,Taiki Ogata,Yoshihiro Miyake","CMOS-MEMS Based Microgravity Sensor and Its Application",,"ECS Transactions",,"Vol. 97","No. 5","pp. 91-108",2020,Apr.