"Tomimasa Go,M. Kitamura,T. Gotow,Y. Miyamoto","PMA Evaluation of TiN ALD in InGaAs Nanosheet MOSFETs","International Microprocesses and Nanotechnology Conference",,,,,,2021,Oct. "Œγ“‘‚Š°,{‰κ’BŽm,‹{–{‹±K","N‹Ι«‚¨‚ζ‚ΡGa‹Ι«GaN MIS\‘’‚ΜŠE–Κ“Α«‚Μ”δŠrŒŸ“’","‘ζ82‰ρ‰ž—p•¨—Šw‰οH‹GŠwpu‰‰‰ο",,,,,,2021,Sept. "T. Gotow,Tatsushi Suka,Y. Miyamoto","Comparative study of breakdown and interface properties of gate insulator on N-polar and Ga-polar GaN MIS capacitor","International Conference on Solid State Devices and Materials",,,,,,2021,Sept. "Y. Miyamoto,T. Gotow","Proposal of breakdown voltage control of GaN HEMT by interface charge","Compound Semiconductor Week 2021",,,,,,2021,May "‹{–{‹±K,Œγ“‘‚Š°","ŠE–Κ“d‰Χ—Κ‚Ι‚ζ‚ιGaN HEMT‚Μ‘Οˆ³§Œδ‚Μ’ρˆΔ","“dŽqƒfƒoƒCƒXŒ€‹†‰ο",,,,,,2021,Mar. "T. Aota,A. Hayasaka,I. Makabe,S. Yoshida,T. Gotow,Y. Miyamoto","Wet etching for isolation of N-polar GaN HEMT structure by electrodeless photo-assisted electrochemical reaction",,"Japanese Journal of Applied Physics",," 60"," SCCF06",,2021,Mar.