@inproceedings{CTT100590098, author = {A. Murakami and H-Y. Go and N. Wakiya and T. Kiguchi and Cross Jeffrey and O. Sakurai and K. Shinozaki}, title = {Evaluation and Control of Residual Stress in Fluorite-Type-Oxide Thin Films Deposited by PLD}, booktitle = {22nd Fall Meeting of The Ceramic Society of Japan}, year = 2009, } @inproceedings{CTT100590090, author = {A. Murakami and H.-Y. Go and N. Wakiya and T. Kiguchi and Jeffrey Cross and O. Sakurai and K. Shinozaki}, title = {Evaluation and Control of Residual Stress in Epitaxial Fluorite-Type-Oxide Thin Films Deposited on Si Substrates by PLD}, booktitle = {The 3rd International Conference on Science and Technology for Advanced Ceramics (STAC3).}, year = 2009, } @inproceedings{CTT100590084, author = {Akihiro Murakami and Naoki Wakiya and Tomohiko Yoshioka and Junzo Tanaka and KAZUO SHINOZAKI}, title = {Si基板上に製膜した(001)エピタキシャルYSZ薄膜の残留応力の測定と制御}, booktitle = {Annual Meeting of The Ceramic Society of Japan, 2009}, year = 2009, }