@inproceedings{CTT100800103,
  author = {Takasi Itikawa and Hirofumi Niijima and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {3軸Au錘MEMS加速度センサにおける検出電極構造の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790674,
  author = {Takasi Itikawa and Hirofumi Niijima and Sayaka Koga and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {3軸Au錘MEMS加速度センサにおける平行平板型電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100775374,
  author = {Takasi Itikawa and Hirofumi Niijima and Sayaka Koga and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Au単一錘平行平板型3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760805,
  author = {Hirofumi Niijima and Shouta Otobe and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {高感度MEMS加速度センサのBrownian Noise評価に関する検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760801,
  author = {Hirofumi Niijima and Shouta Otobe and Motohiro Takayasu and Daisuke Yamane and Hiroyuki Ito and Teruaki Safu and Toshifumi Konishi and Shiro Dosho and Shinichi Iida and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-axis Differential MEMS Accelerometer with a Single Au Proof Mass},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100780791,
  author = {Hirofumi Niijima and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100755519,
  author = {Hirofumi Niijima and Motohiro Takayasu and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)},
  booktitle = {},
  year = 2017,
}