@inproceedings{CTT100569905, author = {Masahiro Hirano and Kazutoshi Sakaki and Toshinori Fujita and Kenji Kawashima and Toshiharu Kagawa}, title = {Contorl system design of a pneumatic servo system considering the dynamic characteristics of the servo valve}, booktitle = {7th JFPS international symposium on Fluid Power}, year = 2008, }