@article{CTT100849033, author = {Atsuo Katagiri and Mutsuo Uehara and Mao Kurokawa and Kensuke Akiyama and Takao Shimizu and Masaaki Matsushima and Hiroshi Uchida and Yoshisato Kimura and Hiroshi Funakubo}, title = {Composition Dependence of Crystal Structures and Electrical Properties of Ca-Mg-Si Films Prepared by Sputtering}, journal = {Journal of ELECTRONIC MATERIALS}, year = 2020, } @article{CTT100803190, author = {Mutsuo Uehara and Atsuo Katagiri and Mao Kurokawa and Kensuke Akiyama and Takao Shimizu and Masaaki Matsushima and Hiroshi Uchida and Yoshisato Kimura and Hiroshi Funakubo}, title = {Preparation of CaMgSi and Ca7Mg7.25Si14 single phase films and their thermoelectric properties}, journal = {MRS Adv.}, year = 2019, } @article{CTT100769725, author = {Atsuo Katagiri and Shota Ogawa and Mutsuo Uehara and P. S. Sankara Rama Krishnan and Mao Kurokawa and Masaaki Matsushima and Takao Shimizu and Kensuke Akiyama and Hiroshi Funakubo}, title = {Growth of (111)-oriented epitaxial magnesium silicide (Mg2Si) films on (001) Al2O3 substrates by RF magnetron sputtering and their properties}, journal = {J. Mater. Sic.}, year = 2018, } @article{CTT100769728, author = {Mao Kurokawa and Takao Shimizu and Mutsuo Uehara and Atsuo Katagiri and Kensuke Akiyama and Masaaki Matsushima and Hiroshi Uchida and Yoshisato Kimura and Hiroshi Funakubo}, title = {Control of p- and n-type Conduction in Thermoelectric Non-doped Mg2Si Thin Films Prepared by Sputtering Method}, journal = {MRS Advances}, year = 2018, } @inproceedings{CTT100853256, author = {Atsuo Katagiri and Mutsuo Uehara and Mao Kurokawa and Kensuke Akiyama and masaaki matsushima and Hiroshi Uchida and YOSHISATO KIMURA and HIROSHI FUNAKUBO}, title = {Ca- Mg-Si三元系熱電材料におけるSi含有量変化に伴う導電型の制御}, booktitle = {}, year = 2020, } @inproceedings{CTT100803841, author = {Hiroshi Funakubo and Mutsuo Uehara and Mao Kurokawa and Atsuo Katagiri and Kensuke Akiyama and Takao Shimizu and Masaaki Matsusima and Hiroshi Uchida and Yoshisato Kimura}, title = {Composition Dependency of Thermoelectric Properties in Ca-Mg-Si System Using Thin Films Prepared by RF Magnetron Sputtering Method}, booktitle = {}, year = 2018, } @inproceedings{CTT100803837, author = {Hiroshi Funakubo and Mutsuo Uehara and Mao Kurokawa and Atsuo Katagiri and Kensuke Akiyama and Takao Shimizu and Masaaki Matsusima and Hiroshi Uchida and Yoshisato Kimura}, title = {Growth of Mg-Ca-Si thick flms by RF sputtering method and their thermoelectric property}, booktitle = {}, year = 2018, } @inproceedings{CTT100769729, author = {Ryan M. L. McFadden and Aris Chatzichristos and Martin H. Dehn and Derek Fujimoto and Hiroshi Funakubo and Alexander Gottberg and Taro Hitosugi and Victoria L. Karner and Robert F. Kiefl and Mao Kurokawa and Jens Lassen and C. D. Philip Levy and Ruohong Li and Gerald D. Morris and Matthew R. Pearson and Susumu Shiraki and Monika Stachura and Jun Sugiyama and D´aniel M. Szunyogh and W. Andrew MacFarlane}, title = {On the Use of 31Mg for β-Detected NMR Studies of Solids}, booktitle = {JPS Conf. Proc.}, year = 2018, } @inproceedings{CTT100771797, author = {Mao Kurokawa and Mutsuo Uehara and Daichi Ichinose and Takao Shimizu and Kensuke Akiyama and Masaaki Matsushima and Hiroshi Uchida and Yoshisato Kimura and Atsuo Katagiri and Hiroshi Funakubo}, title = {Control of P-Type and N-Type Conduction in Thermoelectric Mg2Si Thin Films Prepared by Sputtering Method}, booktitle = {}, year = 2017, } @inproceedings{CTT100771556, author = {Ryan Mcfadden and Andrew Macfarlane and Aris Chatzichristos and Martin Dehn and FDerek ujimoto and Hiroshi Funakubo and Alexander Gottberg and Taro Hitosugi and Victoria Karner and Robert Kiefl and Mao Kurokawa and Jens Lassen and Phil Levy and Rhohong Li and Matthew Pearson and Gerald Morris and Susumu Shiraki and Monika Stachura and Jun Sugiyama and Daniel Szunyogh}, title = {On the use of 31Mg (I = 1/2, Tβ = 334 ms) for β-detected NMR studies of condensed matter}, booktitle = {}, year = 2017, } @inproceedings{CTT100722306, author = {Mao Kurokawa and Mutsuo Uehara and Daichi Ichinose and Takao Shimizu and Kensuke Akiyama and masaaki matsushima and Hiroshi Uchida and HIROSHI FUNAKUBO}, title = {Mg2Si薄膜の熱電特性に及ぼす歪みの影響}, booktitle = {}, year = 2016, } @inproceedings{CTT100722224, author = {M. Uehara and M. Kurokawa and K. Akiyama and T. Shimizu and M. Matsushima and H. Uchida and Y. Kimura and H. Funakubo}, title = {Thermoelectric characterization of sputtered Ca-Mg-Si films}, booktitle = {}, year = 2016, } @inproceedings{CTT100722199, author = {Mao Kurokawa and Mutsuo Uehara and Kensuke Akiyama and masaaki matsushima and Hiroshi Uchida and YOSHISATO KIMURA and HIROSHI FUNAKUBO}, title = {Mg2Si 薄膜の熱電特性に及ぼす種々の因子の影響}, booktitle = {}, year = 2016, } @inproceedings{CTT100722197, author = {Mutsuo Uehara and Mao Kurokawa and Kensuke Akiyama and Takao Shimizu and masaaki matsushima and Hiroshi Uchida and YOSHISATO KIMURA and HIROSHI FUNAKUBO}, title = {スパッタリング法によるCa-Mg-Si 基膜熱電材料の特性評価}, booktitle = {}, year = 2016, } @inproceedings{CTT100721711, author = {Mutsuo Uehara and Mao Kurokawa and Kensuke Akiyama and masaaki matsushima and Hiroshi Uchida and YOSHISATO KIMURA and HIROSHI FUNAKUBO}, title = {スパッタリング法によるCa-Mg-Si基膜の作製と特性評価}, booktitle = {}, year = 2015, } @misc{CTT100789757, author = {HIROSHI FUNAKUBO and Mao Kurokawa}, title = {シリコン系薄膜及びその製造方法}, howpublished = {RegisteredPatent}, year = 2022, month = {}, note = {特願2018-068515(2018/03/30), 特開2018-174325(2018/11/08), 特許第7076096号(2022/05/19)} }