@inproceedings{CTT100628090, author = {Y. Takimoto and Huang Bin and O. Sakuchi and M. Watanabe and E. Hotta}, title = {Study of a Gas Jet Type Z-pinch EUV Light Source}, booktitle = {Frontiers of Particle Beam and High Energy Density Plasma Science using Pulse Power Technology}, year = 2011, } @inproceedings{CTT100618698, author = {Osamu Sakuchi and Fei Jiang and Junzaburo Yamada and Qiushi Zhu and Masato Watanabe and Tohru Kawamura and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Development of Xenon Gas-Jet Z-Pinch Discharge and Laser Triggered Tin Discharge Light Sources for EUV Lithography}, booktitle = {ICPP2008 Abstracts}, year = 2008, } @inproceedings{CTT100618699, author = {Masato Watanabe and Nozomu Kishi and Junzaburo Yamada and Osamu Sakuchi and Jiang Fei and Zhu Qiushi and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Experimental Study on Xenon and Tin Discharge Produced Plasma EUV Light Source}, booktitle = {IEEE Conference Record Abstracts The 35th IEEE International Conference on Plasma Science}, year = 2008, } @inproceedings{CTT100549107, author = {Sakuchi Osamu and Iizuka Naoya and Jiang Fei and Watanabe Masato and Kawamura Tohru and Okino Akitoshi and Horioka Kazuhiko and Hotta Eiki}, title = {Development of a Gas Jet-Type Z-pinch Plasma Light Source for EUV Lithography}, booktitle = {}, year = 2008, } @misc{CTT100591010, author = {EIKI HOTTA and MASATO WATANABE and Yusuke Sakai and Kunihiko Tomiyasu and Masashi Shimizu and Osamu Sakuchi and Shunsuke Takahashi and Junzaburo Yamada and Qiushi Zhu and Kai Yokoyama and daisuke kato}, title = {放電型ビーム核融合中性子源}, year = 2009, }