@article{CTT100664940, author = {B.Huang and T.Tomizuka and B.Xie and Y.Sakai and Q.Zhu and I.Song and A.Okino and F.Xiao and M.Watanabe and E.Hotta}, title = {Simulation and mitigation of the magneto-Rayleigh-Taylor instabilities in Z-pinch gas discharge extreme ultraviolet plasma radiation sources}, journal = {Physics of Plasmas}, year = 2013, } @article{CTT100648654, author = {Y. Sakai and J. Rosenzweig and H. Kumai and Y. Nakanishi and Y. Ishizuka and S. Takahashi and T. Komatsu and Y. Xiao and H. Bin and Z. Qiushi and Y. Hayashi and I. Song and T. Kawamura and M. Watanabe and E. Hotta}, title = {Observation of emission process in hydrogen-like nitrogen Z-pinch discharge with time integrated soft X-ray spectrum pinhole image}, journal = {Physics of Plasmas}, year = 2013, } @article{CTT100632452, author = {Qiushi Zhu and Takahiro Muto and Junzaburo Yamada and Nozomu Kishi and Masato Watanabe and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method}, journal = {J. Appl. Phys.}, year = 2011, } @article{CTT100619497, author = {Q Zhu and J Yamada and N Kishi and M Watanabe and A Okino and K Horioka and E Hotta}, title = {Investigation of the dynamics of the Z-pinch imploding plasma for a laser-assisted discharge-produced Sn plasma EUV source}, journal = {J. Phys. D: Appl. Phys.}, year = 2011, } @article{CTT100605327, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Tomonao Hosokai and Masato Watanabe and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Structure and Expansion Characteristics of Laser Ablation Tin Plasma into a Vacuum}, journal = {Jpn. J. Appl. Phys.}, year = 2010, } @article{CTT100591013, author = {Junzaburo Yamada and Zhu Qiushi and Nozomu Kishi and Masato Watanabe and Akitoshi Okino and Tohru Kawamura and Kazuhiko Horioka and Eiki Hotta}, title = {Development of laser triggered tin discharge EUV light source}, journal = {Pulsed Power Technology and Its Application to Plasma Science}, year = 2009, } @inproceedings{CTT100696062, author = {E. Hotta and Y. Sakai and Y. Hayashi and G. Niimi and B. Huang and Q. Zhu and I. Song and M. Watanabe}, title = {Extreme ultraviolet light sources and soft x-ray laser based on discharge produced plasma}, booktitle = {Proc. of SPIE}, year = 2015, } @inproceedings{CTT100645586, author = {T. Muto and Q. Zhu and J. Yamada and N. Kishi and M. Watanabe and E. Hotta}, title = {Estimation of Electron Temperature and Density of the Decay Plasma in a Laser-assisted Discharge Plasma Extreme Ultraviolet Source by using a Modified Stark Broadening Method}, booktitle = {}, year = 2012, } @inproceedings{CTT100632360, author = {Takahiro Muto and Qiushi Zhu and Masato watanabe and Eiki Hotta}, title = {Temporal and spatial eletron density distributions of the laser ablation ti plasma}, booktitle = {The Papers of Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology}, year = 2011, } @inproceedings{CTT100632345, author = {Eiki Hotta and Yusuke Sakai and Qiushi Zhu and Bin Huang and Hideaki Kumai and Masato Watanabe}, title = {EUV and SXR Sources Based on Discharge Produced Plasma}, booktitle = {2011 International Academic Symposium on Optoeletcronics and Microelectronics Technology (IASOMT 2011)}, year = 2011, } @inproceedings{CTT100632355, author = {Zhu Qiushi and Takahiro Muto and Junzaburo Yamada and Nozomu Kishi and Masato watanabe and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Estimation of electron temperature and density of the decay plasma in a LADPP EUV source}, booktitle = {The Papers of Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology}, year = 2011, } @inproceedings{CTT100632346, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Tomonao Hosokai and Masato watanabe and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Pinch dynamics of the 13.5 nm EUV-emitting plasma in a LA-DPP source}, booktitle = {2011 International Academic Symposium on Optoeletcronics and Microelectronics Technology (IASOMT 2011)}, year = 2011, } @inproceedings{CTT100629794, author = {Takahiro Muto and Qiushi Zhu and Masato Watanabe and Eiki Hotta}, title = {Electron density measurement of laser ablated tin plasma}, booktitle = {Proceedings of 2011 Annual Conference of Fundamentals and Materials Society IEE Japan}, year = 2011, } @inproceedings{CTT100615390, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Masato Watanabe and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Effects of plasma dynamics on the EUV emission from laser assisted discharge produced Sn plasma EUV source}, booktitle = {Web}, year = 2010, } @inproceedings{CTT100612225, author = {Masato Watanabe and Yusuke Sakai and Zhu Qiushi and Huang Bin and Yuya Ishizuka and yasushi takimoto and Eiki Hotta}, title = {Development of short wavelength light sources using discharge plasma in low pressure condition}, booktitle = {平成22年電気学会基礎・材料・共通部門大会}, year = 2010, } @inproceedings{CTT100609815, author = {Eiki Hotta and Yusuke Sakai and Zhu Qiushi and Yuya Ishizuka and Yasuhiro Takimoto and Huang Bin and Masato Watanabe}, title = {R&D of EUV and SXR Light Sources at Tokyo Institute of Technology}, booktitle = {2010 Academic Symposium on Optoelectronics and Microelectronics Technology and the 10th Chinese-Russian Symposium on Laser Physics and Laser Technologies}, year = 2010, } @inproceedings{CTT100618694, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Tomonao Hosokai and Masato Watanabe and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Structure and Expansion Characteristics of Laser Ablation Tin Plasma into a Vacuum}, booktitle = {}, year = 2009, } @inproceedings{CTT100572386, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Tomonao Hosokai and MASATO WATANABE and AKITOSHI OKINO and EIKI HOTTA}, title = {Plasma Behavior of Laser Assisted Sn Discharge EUV Source}, booktitle = {平成21年電気学会全国大会}, year = 2009, } @inproceedings{CTT100618697, author = {Eiki Hotta and Nozomu Kishi and Junzaburo Yamada and Qiushi Zhu and Tomonao Hosokai and Masato Watanabe and Akitoshi Okino}, title = {Plasma Dynamics in Laser Triggered Vacuum Arc Sn DPP EUV Source}, booktitle = {}, year = 2008, } @inproceedings{CTT100618698, author = {Osamu Sakuchi and Fei Jiang and Junzaburo Yamada and Qiushi Zhu and Masato Watanabe and Tohru Kawamura and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Development of Xenon Gas-Jet Z-Pinch Discharge and Laser Triggered Tin Discharge Light Sources for EUV Lithography}, booktitle = {ICPP2008 Abstracts}, year = 2008, } @inproceedings{CTT100566019, author = {Masato Watanabe and Junzaburo Yamada and Qiushi Zhu and Eiki Hotta}, title = {Development of Extreme Ultraviolet Radiation Source using Laser Triggered Vacuum Spark Discharge Plasma}, booktitle = {}, year = 2008, } @inproceedings{CTT100618695, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Tomonao Hosokai and Masato Watanabe and Akitoshi Okino and Eiki Hotta}, title = {Study on Sn-Fueled Discharge Produced Plasma (DPP) Extreme Ultraviolet (EUV) Source}, booktitle = {}, year = 2008, } @inproceedings{CTT100618699, author = {Masato Watanabe and Nozomu Kishi and Junzaburo Yamada and Osamu Sakuchi and Jiang Fei and Zhu Qiushi and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta}, title = {Experimental Study on Xenon and Tin Discharge Produced Plasma EUV Light Source}, booktitle = {IEEE Conference Record Abstracts The 35th IEEE International Conference on Plasma Science}, year = 2008, } @inproceedings{CTT100618696, author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Masato Watanabe and Akitoshi Okino and Eiki Hotta}, title = {EUV Radiation from Laser Triggered Tin Target Discharge Produced Plasma}, booktitle = {}, year = 2008, } @inproceedings{CTT100618700, author = {Junzaburo Yamada and Qiushi Zhu and Nozomu Kishi and Masato Watanabe and Majid Masnavi and Akitoshi Okino and Tohru Kawamura and Kazuhiko Horioka and Eiki Hotta}, title = {Development of Laser Triggered Sn Discharge EUV Light Source}, booktitle = {The Papers of Joint Technical Meeting on Pulsed Power Technology and Electrical Discharges}, year = 2008, } @misc{CTT100591010, author = {EIKI HOTTA and MASATO WATANABE and Yusuke Sakai and Kunihiko Tomiyasu and Masashi Shimizu and Osamu Sakuchi and Shunsuke Takahashi and Junzaburo Yamada and Qiushi Zhu and Kai Yokoyama and daisuke kato}, title = {放電型ビーム核融合中性子源}, year = 2009, }