@article{CTT100625873, author = {Masaya Sugiyama and Tomohito Ogura and tomoya higashihara and mitsuru ueda}, title = {Development of a Chemically Amplified Photosensitive Polyimide Based on Poly(amic acid), a Dosslution Inhibitor, and a Photoacid Generator}, journal = {J. Photopolym. Sci.&Technol.}, year = 2010, }