@article{CTT100800916, author = {K. Hotta and Y. Tomizuka and K. Itagaki and I. Makabe and S. Yoshida and Y. Miyamoto}, title = {Annealing temperature dependence of alloy contact for N-polar GaN HEMT structure}, journal = {Jpn. J. Appl. Phys}, year = 2019, } @inproceedings{CTT100822692, author = {早坂 明泰 and 青沼 遼介 and 堀田 航史 and 金井 七重 and 眞壁 勇夫 and 吉田 成輝 and 宮本 恭幸}, title = {N極性GaN HEMT作製プロセスにおけるプラズマダメージの低減}, booktitle = {}, year = 2019, } @inproceedings{CTT100800936, author = {A. Hayasaka and R. Aonuma and K. Hotta and I. Makabe and S. Yoshida and Y. Miyamoto}, title = {N-polar GaN HEMT with Al2O3 gate insulator}, booktitle = {}, year = 2019, } @inproceedings{CTT100800846, author = {早坂 明泰 and 青沼 遼介 and 堀田 航史 and 眞壁 勇夫 and 吉田 成輝 and 宮本 恭幸}, title = {Al2O3ゲート絶縁膜を持つN極性GaN HEMT}, booktitle = {}, year = 2019, } @inproceedings{CTT100800930, author = {K. Hotta and Y. Tomizuka and K. Itagaki and I. Makabe and S. Yoshida and Y. Miyamoto}, title = {Annealing temperature dependence of alloy contact for N-polar GaN HEMT structure}, booktitle = {}, year = 2018, } @inproceedings{CTT100800852, author = {堀田 航史 and 富塚 ゆみ子 and 板垣 光祐 and 眞壁 勇夫 and 吉田 成輝 and 宮本 恭幸}, title = {N極性GaN HEMT構造のコンタクト抵抗の熱処理温度依存性}, booktitle = {}, year = 2018, }