@inproceedings{CTT100939013, author = {He Wentao and Tetsuji Kiyota and Kenta Doi and Yuya Yamashita and Wataru Kikuchi and Shuhei Watanabe and Ayaki Sakurai and Yuchen Ye and Kazuki Shimatani and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatially Resolved Parameter-Measurement of Oxygen ICP via Optical Emission Spectroscopy with Tomographic Analysis}, booktitle = {Bull. American Phys. Soc.}, year = 2025, } @inproceedings{CTT100939034, author = {Yuchen Ye and Kenta Doi and Tetsuji Kiyota and Wataru Kikuchi and Kazuki Shimatani and Hinata Hanyu and Wentao He and Ayaki Sakurai and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatial distribution of electron temperature and density in argon RF-biased ICP with non-quasi-neutrality effects}, booktitle = {Bull. American Phys. Soc.}, year = 2025, } @inproceedings{CTT100937886, author = {何 文涛 and 清田 哲司 and 土居 謙太 and 中尾 裕利 and 小関 智光 and 内記 一宏 and Li Kangbai and 大見 俊一郎 and 赤塚 洋}, title = {トモグラフィー発光分光法による減圧酸素ICPの空間分解計測}, booktitle = {第86回応用物理学会秋季学術講演会 講演予稿集}, year = 2025, } @inproceedings{CTT100929943, author = {Yuchen Ye and Kenta Doi and Tetsuji Kiyota and Kazuki Shimatani and Ayaki Sakurai and Wentao He and Yuya Yamashita and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Exploring Multiple Solutions of Electron Temperature and Density in the Argon Collisional-Radiative Model Using Monte Carlo Simulations}, booktitle = {Proceedings of ISPlasma2025/IC-PLANTS2025}, year = 2025, } @inproceedings{CTT100927998, author = {山下 雄也 and 土居 謙太 and 清田 哲司 and 叶 宇晨 and 菊地 航行 and 島谷 和希 and 何 文涛 and 羽生 陽向 and 櫻井 彩貴 and 根津 篤 and 赤塚 洋}, title = {トモグラフィック発光分光計測とAr衝突輻射モデルにもとづくCF4/O2/Arプラズマの診断--他原子種の励起状態分布が診断結果に及ぼす影響}, booktitle = {「プラズマの分光診断と原子分子素過程の研究フロンティア」 「原子分子データ応用フォーラムセミナー」要旨集}, year = 2024, } @inproceedings{CTT100925568, author = {山下 雄也 and 土居 謙太 and 清田哲司 and 叶宇晨 and 島谷和希 and 何文涛 and 羽生陽向 and 菊地航行 and 櫻井彩貴 and 根津篤 and 赤塚洋}, title = {トモグラフィック発光分光計測とアルゴン衝突輻射モデルにもとづくCF4/O2/Arプラズマの電子温度・電子密度・EEDFの位置分布診断}, booktitle = {第85回応用物理学会秋季学術講演会 講演要旨集}, year = 2024, }