@article{CTT100887487, author = {Y. Ito and S. Tamai and T. Hoshi and T. Gotow and Y. Miyamoto}, title = {Dependence of Process Damage on GaN Channel Thickness in AlGaN/GaN High-electron-mobility Transistors with Back-barrier Layers}, journal = {JPN. J. APPL. PHYS.}, year = 2023, } @inproceedings{CTT100887483, author = {Y. Ito and S. Tamai and T. Hoshi and Y. Miyamoto}, title = {GaN channel thickness dependence in AlGaN / GaN HEMT structures with back barriers}, booktitle = {}, year = 2022, }