@article{CTT100875654,
  author = {Kohei Shibata and Akihiro Uchiyama and Akira Onishi and Katsuyuki Machida and Parthojit Chakraborty and Shin-ichi Iida and Toshifumi Konishi and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure},
  journal = {IEEE Sensors Journal},
  year = 2022,
}

@article{CTT100866853,
  author = {Akira Onishi and Kohei Shibata and Akihiro Uchiyama and Katsuyuki  Machida and Taiki  Ogata and Noboru  Ishihara and Hirotaka Uchitomi and Tso-Fu Mark  Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki  Ito},
  title = {Suppressed Drift and Low-Noise Sensor Module  with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement},
  journal = {Japanese Journal of Applied Physics},
  year = 2022,
}

@inproceedings{CTT100873384,
  author = {大西哲 and 内山晃宏 and 柴田滉平 and 市川崇志 and 李尚曄 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {3次元容量検出電極による単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873383,
  author = {柴田滉平 and 内山晃宏 and 大西哲 and 李尚曄 and 町田克之 and 石原昇 and 益一哉 and 伊藤浩之},
  title = {Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873385,
  author = {内山晃宏 and 柴田滉平 and 大西哲 and 市川崇志 and 飯田慎一 and 李尚曄 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {ワイドレンジAu錘1軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873379,
  author = {大西哲 and 内山晃宏 and 柴田滉平 and 市川崇志 and 李尚曄 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873378,
  author = {柴田滉平 and 内山晃宏 and 大西哲 and 李尚曄 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873362,
  author = {Akihiro Uchiyama and Takasi Ichikawa and Kohei Shibata and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {A MEMS accelerometer with a single axis two proof masses for a wide detection range},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873377,
  author = {内山晃宏 and 市川崇志 and 柴田滉平 and 飯田慎一 and 李尚曄 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {ワイドレンジ検出可能なAu錘1軸MEMS加速度センサ の検討},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100873376,
  author = {Takasi Ichikawa and Akihiro Uchiyama and Kohei Shibata and Shinichi Iida and Sangyeop Lee and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu and Hiroyuki Ito},
  title = {A 3-D capacitive-detection electrode for a single gold proof-mass three-axis MEMS accelerometer},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100842066,
  author = {内山晃宏 and 市川 崇志 and 古賀 達也 and 町田 克之 and 益 一哉 and 石原昇 and 飯田 慎一 and 伊藤 浩之},
  title = {Au錘一軸MEMS加速度センサの差動容量型電極構造の検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842067,
  author = {市川 崇志 and 内山晃宏 and 古賀 達也 and 町田 克之 and 石原昇 and 益 一哉 and 飯田 慎一 and 伊藤 浩之},
  title = {100 nG/√Hz レベルを目指した分割 2 重電極を有する単一Au錘 3 軸 MEMS 加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842069,
  author = {内山晃宏 and 市川 崇志 and 古賀達也 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {マイクロGレベルセンシングのための金錘1軸差動容量型MEMS加速度センサ},
  booktitle = {},
  year = 2020,
}