@inproceedings{CTT100939081,
  author = {Masato Sone and Kazuhito Higuchi and Nao Yoshimoto and Tetsuya Shimizu and Takashi Nagoshi and Tomoyuki Kurioka and Tso-Fu Mark Chang},
  title = {Application of electrodeposition utilizing supercritical carbon dioxide into nano-scale Cu wiring toward eco-friendly integrated circuit technology},
  booktitle = {THE XI'AN CARBON MEETING- An International Meeting on Carbon Pollution, Sequestration and Conversion to Energy and Chemicals},
  year = 2025,
}

@inproceedings{CTT100702796,
  author = {Masato Sone and Tso-Fu Mark Chang and Tetsuya Shimizu and Nao Shinoda},
  title = {Nanoscale Wiring by Cu Electrodeposition in Supercritical CO2 Emulsified Electrolyte with Continuous-Flow Reaction System (Invited Lecture)},
  booktitle = {Separation Techniques 2016},
  year = 2016,
}

@inproceedings{CTT100701914,
  author = {Masato Sone and Tso-Fu Mark Chang and Tetsuya Shimizu and Nao Shinoda},
  title = {Nanoscale Wiring by Cu Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte toward 3D Integrated Circuits (Invited Lecture)},
  booktitle = {CC3DMR},
  year = 2016,
}

@inproceedings{CTT100658137,
  author = {Hikaru Kinashi and Tetsuya Shimizu and Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone},
  title = {Glow discharge optical emission spectroscopic study of Cu film fabricated by electrodepostion using supercritical CO2 emulsified electrolyte},
  booktitle = {TACT2013},
  year = 2013,
}