@inproceedings{CTT100943076, author = {Hisashi Takahata and Tomoyuki Kurioka and Torauto Yamada and Chihaya Mukaide and Katsuyuki Machida and Gen Hikosaka and Chun-Yi Chen and Tso-Fu Mark Chang and Yoshihiro Miyake and Hiroyuki Ito and Masato Sone}, title = {Geometric Effects on the Mechanical Characteristics of Ti/Au Multi-layered Serpentine Springs toward MEMS Applications}, booktitle = {}, year = 2026, } @inproceedings{CTT100944889, author = {高畑 寿志 and 栗岡 智行 and 彦坂 元 and 山田 虎人 and 向出 千隼 and 町田 克之 and Chun-Yi Chen and Tso-Fu Mark Chang and 三宅 美博 and 伊藤 浩之 and 曽根 正人}, title = {高感度静電容量型 MEMS 加速度センサのための九十九折ばね解析モデルの提案}, booktitle = {}, year = 2026, } @inproceedings{CTT100942950, author = {Hisashi Takahata and Tomoyuki Kurioka and Torauto Yamada and Chihaya Mukaide and Katsuyuki Machida and Chang Tso-Fu Mark and Chen Chun-Yi and Yoshihiro Miyake and Hiroyuki Ito and Masato Sone}, title = {Analytical Modeling of Serpentine Spring for Gold Proof-mass Single-axis MEMS Accelerometer}, booktitle = {APCOT 2026}, year = 2026, } @inproceedings{CTT100942951, author = {Torauto Yamada and Chihaya Mukaide and Hisashi Takahata and Tomoyuki Kurioka and Katsuyuki Machida and Tso-Fu Mark Chang and Yoshihiro Miyake and Masato Sone and Hiroyuki Ito}, title = {A Highly Sensitive Single-Axis Gold MEMS Capacitive Accelerometer Improved with Spring and Proof-Mass Structures}, booktitle = {IEEE INERTIAL 2026, The 13th IEEE International Symposium on Inertial Sensors & Systems}, year = 2026, } @inproceedings{CTT100941060, author = {高畑 寿志 and 栗岡 智行 and 山田 虎人 and 向出 千隼 and 町田 克之 and Chen Chun-Yi and Chang Tso-Fu Mark and 三宅 美博 and 伊藤 浩之 and 曽根 正人}, title = {Ti/Au積層九十九折ばねのばね定数に対するTi/Au膜厚の影響評価}, booktitle = {第73回応用物理学会春季学術講演会}, year = 2026, } @inproceedings{CTT100938904, author = {高畑 寿志 and 栗岡 智行 and 山田 虎人 and 町田 克之 and Tso-Fu Mark Chang and 三宅 美博 and 伊藤 浩之 and 曽根 正人}, title = {Ti/Auで形成した九十九折ばねにおけるTi膜のばね形状への影響に関する検討}, booktitle = {}, year = 2025, }