@article{CTT100902767, author = {Takumi Akiyama and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers  }, journal = {Micro and Nano Engineering}, year = 2023, } @inproceedings{CTT100873967, author = {Takumi Akiyama and Chun-Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS}, booktitle = {}, year = 2022, } @inproceedings{CTT100865533, author = {秋⼭ 拓海 and CHIENYu-An and Chun-Yi Chen and Tso-Fu Chang and 伊藤浩之 and 町⽥克之 and 三宅美博 and 曽根正⼈}, title = {MEMSデバイスへの応⽤に向けた⾦ニッケル合⾦の微⼩機械的特性 の評価}, booktitle = {}, year = 2022, } @inproceedings{CTT100862643, author = {Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Alloy Electrodeposition of Gold-Nickel Alloys and the Mechanical Property in Micro-Scale}, booktitle = {TACT2021 International Thin Films Conference}, year = 2021, } @inproceedings{CTT100860788, author = {Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone}, title = {Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components}, booktitle = {}, year = 2021, }