@article{CTT100749256, author = {Tatsuya Sodekoda and Hajime Kuwabara and Masashi Masuda and Kazuhiko Horioka}, title = {Demonstration of Rapid Electrical Recovery in Repetitive Operation of a Counter-Facing Plasma-Focus Device}, journal = {Plasma and Fusion Research}, year = 2017, } @inproceedings{CTT100759141, author = {K. Kawaguchi and T.Sodekoda and H. Kuwabara and M. Masuda and S. Liu and K. Kanou and M. Nakajima and T. Kawamura and K. Horioka}, title = {Plasma Dynamics in Counter-Facing Plasma-Focus Type Extreme-Ultraviolet Light Source}, booktitle = {NIFS-PROC-105 : Proc. National Institute for Fusion Science}, year = 2017, } @inproceedings{CTT100672706, author = {Tatsuya Sodekoda and Hajime Kuwabara and Masashi Masuda and Shijia Liu and Kouki Kanou and Kenta Kawaguchi and Kazuhiko Horioka}, title = {Repetitive operation of counter-facing plasma focus device: toward a practical light source for EUV lithography}, booktitle = {Extreme Ultraviolet (EUV) Lithography V}, year = 2014, } @inproceedings{CTT100664425, author = {劉 世家 and 増田政史 and 狩野弘毅 and 川口健太 and 袖子田竜也 and 桑原 一 and 長谷川純 and 河村 徹 and 中島充夫 and 堀岡一彦}, title = {放電プラズマ型極端紫外光発生装置の電極現象に関する研究}, booktitle = {電気学会研究会資料}, year = 2013, } @inproceedings{CTT100653337, author = {増田政史 and 桑原 一 and 中島充夫 and 河村 徹 and 堀岡一彦}, title = {対向プラズマフォーカス型リチウムプラズマ光源の発光スペクトル}, booktitle = {パルスパワー研究会資料集}, year = 2012, } @misc{CTT100684786, author = {堀岡一彦 and 増田政史 and 桑原 一}, title = {プラズマ光源}, howpublished = {登録特許}, year = 2017, month = {}, note = {特願2013-116730(2013/06/03), 特開2014-235887(2014/12/15), 特許第6126466号(2017/04/14)} } @misc{CTT100684796, author = {堀岡一彦 and 増田政史 and 桑原 一}, title = {プラズマ光源}, howpublished = {登録特許}, year = 2017, month = {}, note = {特願2013-116727(2013/06/03), 特開2014-235886(2014/12/15), 特許第6111145号(2017/03/17)} }