@inproceedings{CTT100696797,
  author = {Takuya Kurihara and Michitaka Sato and Shinsuke Mori and Masaaki Suzuki},
  title = {Characterization of magnetic thin films etch process in N2 plasmas},
  booktitle = {Proceedings of 21th International Symposium on Plasma Chemistry (ISPC21)},
  year = 2013,
}