@inproceedings{CTT100830569,
  author = {B. Mizuno and Y. Sasaki and C. G. Jin and K. Okashita and K. Nakamoto and T. Kitaoka and K. Tsutsui and H. A. Sauddin and H. Iwai},
  title = {Production-worthy approach of Plasma Doping (PD)},
  booktitle = {},
  year = 2008,
}

@inproceedings{CTT100830714,
  author = {H. Sauddin and Y. Sasaki and H. Ito and B. Mizuno and P. Ahmet and K. Kakushima and N. Sugii and K. Tsutsui and H. Iwai},
  title = {Leakage Current Characteristics of Ultra-Shallow Junctions formed by B2H6 Plasma Doping},
  booktitle = {},
  year = 2006,
}

@inproceedings{CTT100830665,
  author = {Y. Sasaki and H. Ito and K. Okashita and H. Tamura and C. G. Jin and B. Mizuno and T. Okumura and I. Aiba and Y. Fukagawa and H. Sauddin and K. Tsutsui and H. Iwai},
  title = {Production-worthy USJ formation by self-regulatory plasma doping method},
  booktitle = {},
  year = 2006,
}