@article{CTT100908961,
  author = {Kisuke Miyado and Devi Srujana  Tenneti and Akira Onishi and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2024,
}

@article{CTT100887972,
  author = {Akira Onishi and Kisuke Miyado and Devi Srujana Tenneti and Katsuyuki Machida and Parthojit Chakraborty and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology},
  journal = {2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)},
  year = 2023,
}

@inproceedings{CTT100922775,
  author = {Shunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Tenneti Devi Srujana and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Investigation of Effects of Applied Voltage on Effective Young’s modulus of Ti/Au Multi-Layered Micro-Cantilevers” New Method of Damage and Failure Analysis of Structural Part},
  booktitle = {New Method of Damage and Failure Analysis of Structural Part},
  year = 2024,
}

@inproceedings{CTT100917604,
  author = {Devi Srujana Tenneti and Kisuke Miyado and Chihaya Mukaide and Torauto Yamada and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}

@inproceedings{CTT100917601,
  author = {Kisuke Miyado and Torauto Yamada and Devi Srujana Tenneti and Chihaya Mukaide and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}

@inproceedings{CTT100917498,
  author = {Syunkai Watanabe and Shunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Tenneti Devi Srujana and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Dependence of Applied Voltage on Effective Young’s Modulus of  Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}

@inproceedings{CTT100906278,
  author = {御宿 希祐 and 大西 哲 Tenneti Devi Srujana 町田克之 and TENNETI DEVI and 町田 克之 and 栗岡 智行 and Tso-Fu Mark Chang and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au錘１軸差動型CMOS-MEMS加速度センサのための錘位置制御電極の検討},
  booktitle = {第15回集積化MEMSシンポジウム論文集},
  year = 2023,
}

@inproceedings{CTT100903469,
  author = {御宿 希祐 and 大西 哲 and Devi Srujana Tenneti and 町田 克之 and 栗岡智行 and CHAKRABORTYP and Tso-Fu Mark Chang and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au積層メタル技術によるMEMSデバイスの九十九折ばね定数ばらつき抑制の検討},
  booktitle = {第84回応用物理学会秋季学術講演会 講演予稿集},
  year = 2023,
}

@inproceedings{CTT100903468,
  author = {御宿 希祐Kisuke Miyado and Devi.Srujana Tenneti and Akira Onishi and Katsuyuki Machida and Tomoyuki Kurioka and Parthojit CHAKRABORTY and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer},
  booktitle = {Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02},
  year = 2023,
}

@inproceedings{CTT100903103,
  author = {御宿 希祐 and Tenneti Devi Srujana and 町田 克之 and 栗岡 智行 and Tso-Fu Mark Chang and 曽根 正人 and 三宅 美博 and 伊藤 浩之},
  title = {1 軸差動型CMOS-MEMS加速度センサのFB電圧による錘変位特性の検討},
  booktitle = {},
  year = 2023,
}

@inproceedings{CTT100903096,
  author = {御宿 希祐 and 大西哲 and TENNETIDEVI and 町田克之 and CHAKRABORTYP and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au積層メタル技術によるMEMSデバイスのための九十九折ばね設計手法の検討},
  booktitle = {第70回応用物理学会春季学術講演会},
  year = 2023,
}

@inproceedings{CTT100903097,
  author = {御宿 希祐 and 大西哲 and TENNETIDEVI and CHAKRABORTYP and 町田克之 and 飯田慎一 and 小西敏文 and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {エッチホールを有するAu錘構造のMEMS加速度センサの減衰定数簡易解析モデルの検討},
  booktitle = {第83回応用物理学会秋季学術講演会},
  year = 2022,
}

@inproceedings{CTT100903102,
  author = {御宿 希祐 and 大西哲 and TENNETIDEVI and CHAKRABORTYP and 町田克之 and 飯田慎一 and 小西敏文 and 曽根正人 and 三宅美博 and 伊藤浩之},
  title = {Au錘MEMS容量型加速度センサにおける減衰定数簡易解析モデルの検討},
  booktitle = {},
  year = 2022,
}