@inproceedings{CTT100696797,
  author = {Takuya Kurihara and Michitaka Sato and Shinsuke Mori and Masaaki Suzuki},
  title = {Characterization of magnetic thin films etch process in N2 plasmas},
  booktitle = {Proceedings of 21th International Symposium on Plasma Chemistry (ISPC21)},
  year = 2013,
}

@inproceedings{CTT100662664,
  author = {佐藤 道貴 and 森 伸介 and 鈴木 正昭},
  title = {強磁性金属のエッチング選択性に及ぼす放電条件の影響},
  booktitle = {化学工学会第77年会研究発表講演要旨集},
  year = 2012,
}