@inproceedings{CTT100919093,
  author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Wataru Kikuchi and Yuchen Ye and Atsushi Nezu and Hiroshi Akatsuka},
  title = {Electron temperature diagnosis of CF4/O2 plasma  based on fluorine atomic corona model  by tomographic optical emission spectroscopic measurement},
  booktitle = {Proceedings of ESCAMPIG2024},
  year = 2024,
}