@inproceedings{CTT100909733, author = {Kenta Ishi and Kenta Doi and Tetsuji Kiyota and Yuya Yamashita and Kazuma Yoneda and Shuhei Watanabe and Kazuki Shimatani and Atsushi Nezu and Hiroshi Akatsuka}, title = {Population Kinetics and Number Densities of Excited Species in Nitrogen Inductively Coupled Plasma}, booktitle = {Proc. ISPlasma2024/IC-PLANTS2024/APSPT-13}, year = 2024, } @inproceedings{CTT100908453, author = {石健太 and 土居謙太 and 清田哲司 and 山下雄也 and 米田和真 and 渡邊修平 and 島谷和希 and 根津篤 and 赤塚洋}, title = {誘導結合窒素プラズマ中の励起状態数密度と電子温度の関係性に関する議論}, booktitle = {第41回 プラズマプロセシング研究会 プロシーディングス}, year = 2024, } @inproceedings{CTT100905976, author = {K. Ishi and K. Yoneda and Y. Yamashita and A. Nezu and H. Akatsuka}, title = {Discussion on Number Densities of Excited States and Gas Temperature in Inductively Coupled Nitrogen Plasma}, booktitle = {E-Abstract book of The 13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)}, year = 2023, } @inproceedings{CTT100887185, author = {米田 和真 and 山下 雄也 and 土居 謙太 and 清田 哲司 and 浅川 慶一郎 and 石 健太 and 根津 篤 and 赤塚 洋}, title = {トモグラフィック発光分光計測による窒素誘導結合プラズマの振動温度・回転温度の空間分布診断}, booktitle = {2023年第70回応用物理学会春季学術講演会 講演予稿集}, year = 2023, } @inproceedings{CTT100896398, author = {K. Yoneda and Y. Yamashita and K. Doi and T. Kiyota and K. Asakawa and K. Ishi and A. Nezu and H. Akatsuka}, title = {Spatial distribution of vibrational and rotational temperatures of N2 ICP by tomographic optical emission spectroscopic measurement}, booktitle = {Program-book-abstracts of ICPIG XXXV}, year = 2023, } @inproceedings{CTT100887151, author = {小林 明 and 山下 雄也 and 砂川 晃伯 and 米田 和真 and 清田 哲司 and 土居 謙太 and 根津 篤 and 赤塚 洋}, title = {発光分光診断による CF B−X 遷移の振動温度の推定}, booktitle = {2023年第70回応用物理学会春季学術講演会 講演予稿集}, year = 2023, } @inproceedings{CTT100882444, author = {Yuya YAMASHITA and Kenta DOI and Tetsuji KIYOTA and Akira KOBAYASHI and Sotaro HOSOYA and Kazuma YONEDA and Atsushi NEZU and Hiroshi AKATSUKA}, title = {Position dependence diagnosis of electron temperature and density of inductively coupled argon plasma based on Abel inverted optical emission spectroscopic measurement and collisional-radiative model}, booktitle = {Proc. ICRP-11/GEC2022}, year = 2022, }