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  author = {Shoutarou Andou and Tatsuya Nishio and Yuko Aono and ATSUSHI HIRATA},
  title = {Surface modification of silicon carbide films by silicon elimination process},
  booktitle = {Proceedings of 5th BIT-TIT Workshop on Mechanical Engineering},
  year = 2014,
}

@inproceedings{CTT100664814,
  author = {青野祐子 and 西尾龍哉 and 平田敦},
  title = {炭化ケイ素薄膜表面への炭素潤滑層の形成},
  booktitle = {第27回ダイヤモンドシンポジウム講演要旨集},
  year = 2013,
}

@inproceedings{CTT100661548,
  author = {西尾龍哉 and 青野祐子 and 平田敦},
  title = {ケイ素の脱離による炭化ケイ素膜の表面改質},
  booktitle = {2013年度精密工学会春季大会学術講演会講演論文集},
  year = 2013,
}

@inproceedings{CTT100643198,
  author = {西尾龍哉 and 平田 敦},
  title = {電子ビーム励起プラズマを利用した炭化ケイ素膜の合成},
  booktitle = {2012年度精密工学会春季大会学術講演会講演論文集},
  year = 2012,
}