@article{CTT100614619, author = {Kuniyuki KAKUSHIMA and Koichi Okamoto and Tomotsune Koyanagi and Miyuki Kouda and Kiichi Tachi and Takamasa Kawanago and Jaeyeol Song and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Selection of rare earth silicates for highly scaled gate dielectrics}, journal = {Microelectronic Engineering}, year = 2010, } @article{CTT100607472, author = {Kuniyuki KAKUSHIMA and Kiichi Tachi and M.Adachi and Koichi Okamoto and Soshi Sato and Jaeyeol Song and Takamasa Kawanago and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Interface and electrical properties of La-silicate for direct contact of high-k with silicon}, journal = {Solid-State Electronics}, year = 2010, } @article{CTT100613519, author = {M.K.Bera and Jaeyeol Song and Ahmet Parhat and Kuniyuki KAKUSHIMA and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Yttrium-scandium oxide as high-k gate dielectric for germanium metal-oxide-semiconductor devices}, journal = {SEMICONDUCTOR SCIENCE AND TECHNOLOGY}, year = 2010, } @article{CTT100607582, author = {M.K. Bera and Jaeyeol Song and Ahmet Parhat and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Yttrium-scandium oxide as high-k gate dielectric for germanium metal-oxide-semiconductor devices}, journal = {SEMICONDUCTOR SCIENCE AND TECHNOLOGY}, year = 2010, } @article{CTT100604483, author = {Kuniyuki KAKUSHIMA and Koichi Okamoto and Tomotsune Koyanagi and Miyuki Kouda and Kiichi Tachi and Takamasa Kawanago and Jaeyeol Song and Ahmet Parhat and Hiroshi Nohira and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {SrO capping effect for La2O3/ Ce-Silicate gate dielectrics}, journal = {Microelectronics Reliability 50}, year = 2010, } @article{CTT100607466, author = {Kuniyuki KAKUSHIMA and Tomotsune Koyanagi and Kiichi Tachi and Jaeyeol Song and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Characterization of flatband voltage roll-off and roll-up behavior in La2O3/silicate gate dielectric}, journal = {Solid-State Electronics}, year = 2010, } @article{CTT100600446, author = {Kuniyuki KAKUSHIMA and Kiichi Tachi and Jaeyeol Song and Soshi Sato and Hiroshi Nohira and E. Ikenaga and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Comprehensive x-ray photoelectron spectroscopy study on compositional gradient lanthanum silicate film}, journal = {JOURNAL OF APPLIED PHYSICS}, year = 2009, } @article{CTT100586853, author = {Takamasa Kawanago and Kiichi Tachi and Jaeyeol Song and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Electrical characterization of directly deposited La-Sc oxides complex for gate insulator application}, journal = {Microelectronic Engineering}, year = 2007, } @article{CTT100586852, author = {Jaeyeol Song and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Improvement of interfacial properties with interfacial layer in La2O3 / Ge structure}, journal = {Microelectronic Engineering}, year = 2007, } @inproceedings{CTT100613529, author = {角嶋邦之 and 小柳友常 and 来山大祐 and 幸田みゆき and 宋在烈 and 佐藤創志 and 川那子高暢 and M. マイマイティ and 舘喜一 and M.K. Bera and パールハットアヘメト and 野平博司 and 筒井一生 and 西山彰 and 杉井信之 and 名取研二 and 服部健雄 and 山田啓作 and 岩井洋}, title = {LaCe シリケート膜を用いたEOT<0.7nm の直接接合 high-k/Si の実現とフラットバンド電圧制御}, booktitle = {,野平博司,筒井一生,西山彰,杉井信之,名取研二,服部健雄,山田啓作,岩井洋“LaCe シリケート膜を用いたEOT<0.7nm の直接接合 high-k/Si の実現とフラットバンド電圧制御” 応用物理学会分科会 シリコンテクノロジー No.127 pp.4-8(2010年7月22日 )}, year = 2010, } @inproceedings{CTT100607843, author = {Kuniyuki KAKUSHIMA and Tomotsune Koyanagi and 来山大祐 and Miyuki Kouda and Jaeyeol Song and Takamasa Kawanago and M. Mamatrishat and Kiichi Tachi and M. K. Bera and Ahmet Parhat and Hiroshi Nohira and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and KENJI NATORI and takeo hattori and Keisaku Yamada and HIROSHI IWAI}, title = {Direct Contact of High-k/Si Gate Stack for EOT below 0.7 nm using LaCe-silicate Layer with Vfb controllability}, booktitle = {}, year = 2010, } @inproceedings{CTT100597891, author = {M.K. Bera and Jaeyeol Song and Ahmet Parhat and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Rare-earth based mixed oxide as high-k gate dielectrics for Ge MOSFET}, booktitle = {}, year = 2009, } @inproceedings{CTT100597900, author = {Jaeyeol Song and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Effect of Ultrathin Si Passivation Layer for La2O3/Ge MOS structure}, booktitle = {}, year = 2009, } @inproceedings{CTT100597766, author = {M.K.Bera and Jaeyeol Song and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Electrical Properties of Lanthanum-scandate Gate Dielectric Directly Deposited on Ge}, booktitle = {}, year = 2009, } @inproceedings{CTT100597756, author = {Kuniyuki KAKUSHIMA and Koichi Okamoto and Tomotsune Koyanagi and Kiichi Tachi and Miyuki Kouda and Takamasa Kawanago and Jaeyeol Song and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Selection of Rare Earth Silicate with SrO Capping for EOT Scaling below o.5 nm}, booktitle = {}, year = 2009, } @inproceedings{CTT100586499, author = {Takamasa Kawanago and Jaeyeol Song and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Experimental Study for High Efffective Mobility with directly deposited HfO2/La2O3 MOSFET}, booktitle = {INFOS2009}, year = 2009, } @inproceedings{CTT100586498, author = {Jaeyeol Song and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and Nobuyuki Sugii and takeo hattori and HIROSHI IWAI}, title = {Post metallization annealing study in La2O3/Ge MOS structure}, booktitle = {INFOS2009}, year = 2009, } @inproceedings{CTT100585306, author = {宋在烈 and 舘喜一 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {極薄Si界面層を挿入したLa2O3/Ge MIS構造における界面準位密度低減に関する検討}, booktitle = {第56回応用物理学関係連合講演会予稿集}, year = 2009, } @inproceedings{CTT100576379, author = {宋在烈 and 舘喜一 and 岡本晃一 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {Laシリケート層を界面に用いたhigh-k/Si MOS構造の電気特性検討}, booktitle = {春季第55回応用物理学会学術講演会予稿集}, year = 2008, } @inproceedings{CTT100830660, author = {Kuniyuki Kakushima and Kouichi Okamoto and Manabu Adachi and Kiichi Tachi and Jaeyeol Song and Soushi Sato and Takamasa Kawanago and Parhat Ahmet and Kazuo Tsutsui and Nobuyuki Sugii and Takeo Hattori and Hiroshi Iwai}, title = {Band Bending Measurement of HfO2/SiO2/Si Capacitor with ultra-thin La2O3 Insertion by XPS}, booktitle = {}, year = 2007, } @inproceedings{CTT100544685, author = {宋在烈 and 角嶋邦之 and パールハット・アヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {La2O3/Ge MIS 構造における微量Si 界面層導入による電気特性の変化}, booktitle = {秋季第68回応用物理学会学術講演会}, year = 2007, } @inproceedings{CTT100599990, author = {佐藤創志 and 舘喜一 and 宋在烈 and 角嶋邦之 and パールハットアヘメト and 筒井一生 and 杉井信之 and 服部健雄 and 岩井洋}, title = {ラジカル窒化によるLa2O3ゲート絶縁膜への窒素導入効果 : 堆積時窒化によるEOT増加抑制効果(ゲート絶縁膜、容量膜、機能幕及びメモリ技術)}, booktitle = {電子情報通信学会技術研究報告、SDM、シリコン材料・デバイス}, year = 2007, } @inproceedings{CTT100830716, author = {H. Nohira and T. Matsuda and K. Tachi and Y. Shiino and J. Song and Y. Kuroki and J. Ng and P. Ahmet and K. Kakushima and K. Tsutsui and E. Ikenaga and K. Kobayashi and H. Iwai and T. Hattori}, title = {Effect of Deposition Temperature on Thermal Stability of Lanthanum Oxide/Si Interfacial Transition Layer}, booktitle = {}, year = 2006, }