@article{CTT100588767,
  author = {KAZUO TSUTSUI and T Matsuda and M Watanabe and Cheng-Guo Jin and 佐々木雄一朗 and Bunji Mizuno and E Ikenaga and Kuniyuki KAKUSHIMA and Ahmet Parhat and T Maruizumi and Hiroshi Nohira and takeo hattori and HIROSHI IWAI},
  title = {Activated Boron and its Concentration Profiles in Heavily Doped Si Studied by Soft X-ray Photoelectron Spectroscopy and Hall Measurements},
  journal = {Journal of Applied Physics},
  year = 2008,
}

@inproceedings{CTT100615527,
  author = {KAZUO TSUTSUI and Masaoki Tanaka and Norifumi Hoshino and Hiroshi Nohira and Kuniyuki KAKUSHIMA and Ahmet Parhat and 佐々木雄一朗 and Bunji Mizuno and T. Muro and T. Kinoshita and takeo hattori and HIROSHI IWAI},
  title = {Soft X-ray Photoelectron Spectroscopy Study of Activation and Deactivation of Impurities in Shallow Junctions},
  booktitle = {},
  year = 2010,
}

@inproceedings{CTT100605137,
  author = {KAZUO TSUTSUI and Norifumi Hoshino and Yasumasa Nakagawa and Masaoki Tanaka and Hiroshi Nohira and Kuniyuki KAKUSHIMA and Ahmet Parhat and 佐々木雄一朗 and Bunji Mizuno and takeo hattori and HIROSHI IWAI},
  title = {Depth Profiling of Chemical Bonding States of Impurity Atoms and Their Correlation with Electrical Activity in Si Shallow Junctions},
  booktitle = {},
  year = 2010,
}

@inproceedings{CTT100585117,
  author = {酒井一憲 and 中川恭成 and 横田知之 and 金成国 and 岡下勝己 and 佐々木雄一朗 and パールハットアヘメト and 角嶋邦之 and 水野文二 and 服部健雄 and 筒井一生 and 岩井洋},
  title = {3次元Fin構造中不純物プロファイリングのための反復犠牲酸化エッチング},
  booktitle = {秋季第69回応用物理学会学術講演会予稿集},
  year = 2008,
}

@inproceedings{CTT100576432,
  author = {酒井一憲 and 渡邉将光 and 中川恭成 and 金 成国 and 岡下 勝己 and 佐々木雄一朗 and パールハットアヘメト and 角嶋邦之 and 水野 文二 and 服部健雄 and 筒井一生 and 岩井洋},
  title = {極浅接合プロファイリングのための反復犠牲酸化エッチング技術},
  booktitle = {春季第55回応用物理学会学術講演会予稿集},
  year = 2008,
}