@article{CTT100793994,
  author = {Tso-Fu Mark Chang and Hikaru Kinashi and Takashi Nagoshi and Tatsuo Sato and Masato Sone},
  title = {Impurity study of copper film fabricated by electroplating with supercritical carbon dioxide emulsified electrolyte},
  journal = {Copper and Copper Alloy},
  year = 2019,
}

@article{CTT100669338,
  author = {名越貴志 and 木梨光 and 武藤雅英 and Tso-Fu Mark Chang and 里達雄 and 曽根正人},
  title = {超臨界二酸化炭素エマルション中で電気めっきされた銅皮膜のマイクロ圧縮試験による力学的特性評価},
  journal = {銅と銅合金},
  year = 2014,
}

@article{CTT100668489,
  author = {Hikaru Kinashi and Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone},
  title = {Mechanical Properties of Cu Electroplated in Supercritical CO2 Emulsion Evaluated by Micro-Compression Test},
  journal = {Microelectronics Engineering},
  year = 2014,
}

@article{CTT100668115,
  author = {Tetsuya Shimizu and Yuma Ishimoto and Tso-Fu Mark Chang and Hikaru Kinashi and Takashi Nagoshi and Tatsuo Sato and Masato Sone},
  title = {Cu Wiring into Nano-Scale Holes by Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte with a Continuous Flow Reaction System},
  journal = {The Journal of Supercritical Fluids},
  year = 2014,
}

@inproceedings{CTT100658586,
  author = {Masato Sone and Tetsuya Shimizu and Tso-Fu Mark Chang and Yuma Ishimoto and Hikaru Kinashi and Takashi Nagoshi and Tatsuo Sato},
  title = {Nanoscale Wiring By Cu Electrodeposition in Supercritical Carbon Dioxide (Invited Lecture)},
  booktitle = {ECS},
  year = 2013,
}

@inproceedings{CTT100659270,
  author = {名越貴志 and 木梨光 and 武藤雅英 and Tso-Fu Mark Chang and 里達雄 and 曽根正人},
  title = {マイクロ圧縮試験を用いた銅めっき膜の力学的特性評価},
  booktitle = {日本銅学会第５３回講演大会},
  year = 2013,
}

@inproceedings{CTT100659620,
  author = {Tso-Fu Mark Chang and Takashi Nagoshi and Nao Shinoda and HIkaru Kinashi and Tatsuo Sato and Masato Sone},
  title = {Application of Supercritical CO2 in Electroplating of Ni and Cu},
  booktitle = {SuperGreen 2013,The 8th International Conference on Supercritical Fluids},
  year = 2013,
}

@inproceedings{CTT100658137,
  author = {Hikaru Kinashi and Tetsuya Shimizu and Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone},
  title = {Glow discharge optical emission spectroscopic study of Cu film fabricated by electrodepostion using supercritical CO2 emulsified electrolyte},
  booktitle = {TACT2013},
  year = 2013,
}

@inproceedings{CTT100658459,
  author = {Hikaru Kinashi and Takashi Nagoshi and Tso-Fu Mark Chang and Tatsuo Sato and Masato Sone},
  title = {Mechanical Strength of Cu Electroplated in Supercritical CO2 Emulsion Using Micro-Compression Test},
  booktitle = {MNE2013},
  year = 2013,
}