@inproceedings{CTT100932854,
  author = {Yuiko Futagi and Yuki Taoka and Shigeki Saito},
  title = {Shape Effect of Elastic Supporting Component in Array-Electrode-Type Electrostatic-Chucks for Next-Generation Semiconductor Fabrication},
  booktitle = {},
  year = 2025,
}

@inproceedings{CTT100932766,
  author = {二木 結子 and 田岡 祐樹 and 齋藤 滋規},
  title = {集合配列電極型静電チャックにおける電極支持弾性部材の形状が吸着・離脱性能に与える影響},
  booktitle = {},
  year = 2025,
}