@article{CTT100909951, author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers}, journal = {Micro and Nano Engineering}, year = 2024, } @inproceedings{CTT100917499, author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Evaluation of the Effect of Heat Treatment on the Structural Stability of Au Micro-Cantilevers with Ti/Au Multi-layered Structures}, booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)}, year = 2024, } @inproceedings{CTT100908971, author = {宮井 良介 and 栗岡 智行 and Chun-Yi Chen and Tso-Fu Mark Chang and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人}, title = {Ti/Au 積層構造有するマイクロカンチレバーの 構造安定性に対する熱処理の影響評価}, booktitle = {Proc. The 71st JSAP Spring MeetinProc.}, year = 2024, } @inproceedings{CTT100895772, author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer}, booktitle = {49th international conference on Micro and Nano Engineering (MNE2023)}, year = 2023, } @inproceedings{CTT100885240, author = {宮井 良介 and 栗岡 智行 and Chun-Yi Chen and Tso-Fu Mark Chang and 大西 哲 and Parthojit Chakraborty and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人}, title = {Ti/Au 積層構造有するマイクロカンチレバーの長期構造安定性に対する幾何学構造の影響}, booktitle = {第70回応用物理学会春季学術講演会}, year = 2023, }