@article{CTT100664940,
  author = {B.Huang and T.Tomizuka and B.Xie and Y.Sakai and Q.Zhu and I.Song and A.Okino and F.Xiao and M.Watanabe and E.Hotta},
  title = {Simulation and mitigation of the magneto-Rayleigh-Taylor instabilities in Z-pinch gas discharge extreme ultraviolet plasma radiation sources},
  journal = {Physics of Plasmas},
  year = 2013,
}

@article{CTT100648654,
  author = {Y. Sakai and J. Rosenzweig and H. Kumai and Y. Nakanishi and Y. Ishizuka and S. Takahashi and T. Komatsu and Y. Xiao and H. Bin and Z. Qiushi and Y. Hayashi and I. Song and T. Kawamura and M. Watanabe and E. Hotta},
  title = {Observation of emission process in hydrogen-like nitrogen Z-pinch discharge with time integrated soft X-ray spectrum pinhole image},
  journal = {Physics of Plasmas},
  year = 2013,
}

@article{CTT100597639,
  author = {Yusuke Sakai and Shunsuke Takahashi and Takanori Komatsu and Inho Song and Masato Watanabe and Eiki Hotta},
  title = {Highly efficient pulsed power supply system with a two-stage LC generator and a step-up transformer for fast capillary discharge soft x-ray laser at shorter wavelength},
  journal = {Review of Scientific Instruments},
  year = 2010,
}

@article{CTT100608082,
  author = {Yusuke Sakai and Takanori Komatsu and Yifan Xiao and INHO SONG and Gohta Niimi and MASATO WATANABE and AKITOSHI OKINO and EIKI HOTTA},
  title = {Soft X-ray Radiation from Nitrogen Z-pinch Plasma Produced by Capillary Discahrge},
  journal = {IEEJ Trans. FM},
  year = 2007,
}

@article{CTT100408964,
  author = {Smruti Mohanty and T.Sakamoto and Y.Kobayashi and INHO SONG and MASATO WATANABE and Tohru Kawamura and AKITOSHI OKINO and KAZUHIKO HORIOKA and E.Hotta},
  title = {Miniature hybrid plasma focus extreme ultraviolet source driven by 10 kA fast current pulse},
  journal = {Review of Scientific Instruments},
  year = 2006,
}

@article{CTT100408638,
  author = {INHO SONG and Kazuhiro Iwata and Yusuke Homma and Smruti Mohanty and MASATO WATANABE and Tohru Kawamura and AKITOSHI OKINO and KOICHI YASUOKA and KAZUHIKO HORIOKA and Eiki Hotta},
  title = {A comparative study on the performance of a xenon capillary Z-pinch EUV lithography light source using a pinhole camera},
  journal = {Plasma Sources Science and Technology},
  year = 2006,
}

@article{CTT100395788,
  author = {INHO SONG and Kazuhiro IWATA and Yusuke HOMMA and Smruti Mohanty and MASATO WATANABE and Tohru Kawamura and AKITOSHI OKINO and KOICHI YASUOKA and KAZUHIKO HORIOKA and Eiki HOTTA},
  title = {Characteristics of Xenon Capillary Z-Pinch Extreme Ultraviolet Lithography Source Driven by Different dI/dt Discharge Current Pulses},
  journal = {Jpn. J. Appl. Phys.},
  year = 2005,
}

@article{CTT100390525,
  author = {INHO SONG and Smruti Mohanty and MASATO WATANABE and Tohru Kawamura and AKITOSHI OKINO and KAZUHIKO HORIOKA and HOTTA Eiki},
  title = {Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography},
  journal = {J.Plasma Fusion Res.},
  year = 2005,
}

@inproceedings{CTT100696062,
  author = {E. Hotta and Y. Sakai and Y. Hayashi and G. Niimi and B. Huang and Q. Zhu and I. Song and M. Watanabe},
  title = {Extreme ultraviolet light sources and soft x-ray laser based on discharge produced plasma},
  booktitle = {Proc. of SPIE},
  year = 2015,
}

@inproceedings{CTT100611686,
  author = {Yusuke Sakai and Takanori Komatsu and Yifan Xiao and INHO SONG and MASATO WATANABE and AKITOSHI OKINO and EIKI HOTTA},
  title = {Soft X-ray radiation from nitrogen filled capillary z-pinch plasma},
  booktitle = {},
  year = 2006,
}

@inproceedings{CTT100556229,
  author = {岸望 and 飯塚直哉 and 坂本敏郎 and 宋仁皓 and 小林靖典 and S.R. Mohanty and 渡辺正人 and 沖野晃俊 and 堀田栄喜},
  title = {同軸二重ノズル型電極を用いたEUV光源の出力特性},
  booktitle = {平成１８年電気学会基礎・材料・共通部門大会（CD-ROM)},
  year = 2006,
}

@inproceedings{CTT100611697,
  author = {Yusuke Sakai and Takanori Komatsu and Yifan Xiao and INHO SONG and MASATO WATANABE and AKITOSHI OKINO and EIKI HOTTA},
  title = {Soft X-ray radiation from nitrogen filled Z-pinch plasma produced by capillary discharge},
  booktitle = {},
  year = 2006,
}

@inproceedings{CTT100556224,
  author = {Naoya Iizuka and Toshiro Sakamoto and Yasunori Kobayashi and Inho Song and Smruti R. Mohanty and Masato Watanabe and AKITOSHI OKINO and Eiki Hotta},
  title = {Optimization of a gas jet-type Z-pinch discharge EUV light source},
  booktitle = {},
  year = 2006,
}

@inproceedings{CTT100556227,
  author = {渡邊正人 and 宋仁皓 and 小林靖典 and 坂本敏郎 and S.R.Mohanty and 沖野晃俊 and 堀岡一彦 and 堀田栄喜},
  title = {同軸ノズル型電極を用いた放電プラズマからのEUV発光特性},
  booktitle = {第66回応用物理学会学術講演会講演予稿集},
  year = 2005,
}

@inproceedings{CTT100556228,
  author = {渡邊正人 and 宋仁皓 and 小林靖典 and 坂本敏郎 and S.R.Mohanty and 沖野晃俊 and 堀岡一彦 and 堀田栄喜},
  title = {同軸ノズル型電極を用いた放電プラズマからのEUV発光特性},
  booktitle = {第66回応用物理学会学術講演会講演予稿集},
  year = 2005,
}

@inproceedings{CTT100556222,
  author = {Inho Song and Yasunori Kobayashi and Toshiro Sakamoto and Smruti R. Mohanty and Masato Watanabe and Akitoshi Okino and Tohru Kawamura and Koichi Yasuoka and Kazuhiko Horioka and Eiki Hotta},
  title = {Performance of a Gas Jet Type Z-Pinch EUV Light Source},
  booktitle = {31st International Conference on Micro- Nano-Engineering},
  year = 2005,
}

@inproceedings{CTT100556223,
  author = {INHO SONG and K.Iwata and Y.Homma and S.R.Mohanty and MASATO WATANABE and Tohru Kawamura and AKITOSHI OKINO and KOICHI YASUOKA and KAZUHIKO HORIOKA and EIKI HOTTA},
  title = {Development of a gas jet  type Z-pinch EUV light source for lithography},
  booktitle = {},
  year = 2005,
}

@misc{CTT100603393,
  author = {INHO SONG},
  title = {Study on Z-pinch plasma light source for EUV lithography},
  year = 2005,
}



@phdthesis{CTT100603393,
  author = {INHO SONG},
  title = {Study on Z-pinch plasma light source for EUV lithography},
  school = {東京工業大学},
  year = 2005,
}