@article{CTT100843201,
  author = {Yuki Onishi and Ryunosuke Yamashita and Kenji Amaya and Yoshihiko Hirai},
  title = {Numerical analysis of pattern shape deformation in UV imprint considering thermal deformation with UV shrinkage and curing},
  journal = {Journal of Vacuum Science & Technology B},
  year = 2021,
}

@article{CTT100826932,
  author = {Yuki Onishi and Ryunosuke Yamashita and Kenji Amaya and Yoshihiko Hirai},
  title = {Numerical Analysis of Pattern Shape Deformation in UV Imprint Due to Curing Shrinkage},
  journal = {Journal of Photopolymer Science and Technology},
  year = 2020,
}

@article{CTT100807839,
  author = {Yuki Onishi and Ryunosuke Yamashita and Kenji Amaya and Yoshihiko Hirai},
  title = {Numerical modeling method for UV imprint process simulation using thermoviscoelastic constitutive equations},
  journal = {Journal of Vacuum Science & Technology B},
  year = 2019,
}

@inproceedings{CTT100853319,
  author = {Yuki Onishi and Ryunosuke Yamashita and Kenji Amaya and Yoshihiko Hirai},
  title = {Resin Deformation Analysis in UV Imprint Considering UV Shrinkage, Thermal Deformation, and Thermochemical Kinetics},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100852340,
  author = {大西有希 and 山下龍之介 and 天谷賢治 and 平井義彦},
  title = {反応速度論に基づくUV硬化収縮と熱変形を考慮したUVインプリントの形状変形解析},
  booktitle = {},
  year = 2021,
}

@inproceedings{CTT100826933,
  author = {大西有希 and 山下龍之介 and 天谷賢治 and 平井義彦},
  title = {UVインプリントにおける硬化収縮によるパターン形状変形の数値解析},
  booktitle = {第25回計算工学講演会論文集},
  year = 2020,
}

@inproceedings{CTT100807841,
  author = {R. Yamashita and Y. Onishi and K. Amaya and Y. Hirai},
  title = {A Validation of UV Imprint Process Simulation using a Thermo-viscoelastic Constitutive Model},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790639,
  author = {渡辺謙太 and 砂川弘樹 and 山下龍之介 and 安田雅昭 and 大西有希 and 川田博昭 and 平井義彦},
  title = {ナノインプリントにおけるレジスト収縮の補正(3D形状補正)},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100772066,
  author = {Ryunosuke YAMASHITA and Yuki ONISHI and Kenji AMAYA},
  title = {Numerical modeling method to reproduce UV imprint process using thermo-viscoelastic constitutive law},
  booktitle = {},
  year = 2018,
}