@article{CTT100658034,
  author = {Toshifumi Konishi and Daisuke Yamane and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Novel Sensor Structure and its Evaluation for Integratd Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer},
  journal = {Japanese Journal of Applied Physics},
  year = 2013,
}

@inproceedings{CTT100663420,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Sub-1G MEMS Accelerometer},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100658938,
  author = {Daisuke Yamane and Toshifumi Konishi and Takaaki Matsushima and Gou Motohashi and Ken Kagaya and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654653,
  author = {加賀谷 賢 and 小西敏文 and 山根大輔 and 本橋 剛 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＣＭＯＳ-ＭＥＭＳ加速度センサのためのデバイスの評価},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654655,
  author = {小西敏文 and 山根大輔 and 本橋 剛 and 加賀谷 賢 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの設計},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100654654,
  author = {山根大輔 and 小西敏文 and 松島隆明 and 本橋 剛 and 加賀谷 賢 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型ＭＥＭＳ加速度センサの検討},
  booktitle = {},
  year = 2013,
}

@inproceedings{CTT100645036,
  author = {山根大輔 and 本橋 剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサのためのデバイスの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645029,
  author = {本橋 剛 and 小西敏文 and 松島隆明 and 山根大輔 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100645434,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644389,
  author = {松島 隆明 and 小西 敏文 and 本橋 剛 and 山根 大輔 and 伊藤 浩之 and 石原 昇 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討（3）},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644392,
  author = {Daisuke Yamane and Takaaki Matsushima and Toshifumi Konishi and Gou Motohashi and Hiroyuki Ito and Noboru Ishihara and Hiroshi Toshiyoshi and Katsuyuki Machida and Kazuya Masu},
  title = {A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100644390,
  author = {本橋 剛 and 小西 敏文 and 松島 隆明 and 山根 大輔 and 伊藤 浩之 and 石原 昇 and 年吉 洋 and 町田 克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討（4）},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100653249,
  author = {山根大輔 and 本橋剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100640424,
  author = {山根大輔 and 本橋 剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原 昇 and 年吉 洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS加速度センサの検討},
  booktitle = {},
  year = 2012,
}

@inproceedings{CTT100635241,
  author = {本橋剛 and 小西敏文 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS 加速度センサの検討(1)},
  booktitle = {第59 回応用物理学関係連合講演会 講演予稿集},
  year = 2012,
}

@inproceedings{CTT100635244,
  author = {小西敏文 and 本橋剛 and 松島隆明 and 伊藤浩之 and 石原昇 and 年吉洋 and 町田克之 and 益一哉},
  title = {アレイ型CMOS-MEMS 加速度センサの検討 (2)},
  booktitle = {第59 回応用物理学関係連合講演会 講演予稿集},
  year = 2012,
}

@inproceedings{CTT100645031,
  author = {本橋 剛 and 小西敏文 and 松島隆明 and 山根大輔 and 伊藤浩之 and 益一哉 and 町田克之},
  title = {0.35μｍCMOS-LSIによるMEMSセンサ用VCO回路の検討},
  booktitle = {},
  year = 2012,
}