@article{CTT100624778, author = {Bin Huang and Yasuhiro Takimoto and Masato Watanabe and Eiki Hotta}, title = {Effect of Electron Density on Extreme Ultraviolet Output of a Z-Pinch Xe Discharge Produced Plasma Source}, journal = {Japanese Journal of Applied Physics}, year = 2011, } @inproceedings{CTT100629793, author = {Bin Huang and Bin Xie and Fei Jiang and Taku Tomizuka and Yasuhiro Takimoto and Masato Watanabe and Feng Xiao and Eiki Hotta}, title = {Numerical study of the initial gas distribution on a gas jet plasma EUV source}, booktitle = {Proceedings of 2011 Annual Conference of Fundamentals and Materials Society IEE Japan}, year = 2011, } @inproceedings{CTT100628090, author = {Y. Takimoto and Huang Bin and O. Sakuchi and M. Watanabe and E. Hotta}, title = {Study of a Gas Jet Type Z-pinch EUV Light Source}, booktitle = {Frontiers of Particle Beam and High Energy Density Plasma Science using Pulse Power Technology}, year = 2011, } @inproceedings{CTT100616424, author = {滝本泰大 and 黄 斌 and 渡邊正人 and 堀田栄喜}, title = {同軸2重円筒ノズル型電極を用いたガスジェット型放電生成プラズマ光源に関する研究}, booktitle = {電気学会研究会資料}, year = 2010, } @inproceedings{CTT100617313, author = {B. Huang and Y. Takimoto and M. Watanabe and E. Hotta}, title = {Xe-based Gas Jet Type Z-pinch Discharge Produced Plasma (DPP) EUV Source for Lithography}, booktitle = {}, year = 2010, } @inproceedings{CTT100612225, author = {渡邊正人 and 酒井雄祐 and 朱 秋石 and 黄 斌 and 石塚裕也 and 滝本泰大 and 堀田栄喜}, title = {低気圧放電プラズマを用いた短波長光源の開発}, booktitle = {平成22年電気学会基礎・材料・共通部門大会}, year = 2010, } @inproceedings{CTT100611969, author = {Bin Huang and Yasuhiro Takimoto and Masato Watanabe and Eiki Hotta}, title = {Xe-based Z-pinch gas jet type DPP EUV source for lithography}, booktitle = {The Papaers of Joint Technical Meeting on Plasma Science and Pulsed Power Technology}, year = 2010, } @inproceedings{CTT100609815, author = {Eiki Hotta and Yusuke Sakai and Zhu Qiushi and Yuya Ishizuka and Yasuhiro Takimoto and Huang Bin and Masato Watanabe}, title = {R&D of EUV and SXR Light Sources at Tokyo Institute of Technology}, booktitle = {2010 Academic Symposium on Optoelectronics and Microelectronics Technology and the 10th Chinese-Russian Symposium on Laser Physics and Laser Technologies}, year = 2010, } @inproceedings{CTT100600752, author = {Bin Huang and Yasuhiro Takimoto and Masato watanabe and Eiki Hotta}, title = {Xe-based Z-pinch Discharge Produced Plasma (DPP) EUV Source for Lithograph}, booktitle = {The papers of Technical Meeting on Pulsed Power Technology}, year = 2010, }