@article{CTT100572306, author = {Ogawa, H. and Nakanowatari, A. and Kitagawa, K. and Sugiyama, M. and Naito, T.}, title = {Simultaneous measurement of film thickness and surface profile of film-covered objects by monochromatic light interferometry.}, journal = {Transacitons of the Society of Instrument and Control Engineers}, year = 2009, } @article{CTT100582881, author = {Naito, T. and Sugiyama, M. and Ogawa, H. and Kitagawa, K. and Suzuki, K.}, title = {Single-shot interferometry of film-covered objects.}, journal = {Journal of the Japan Society Precision Engineering}, year = 2009, } @inproceedings{CTT100575833, author = {杉山将 and 北川克一 and 鈴木一嘉 and 内藤 卓人 and 小川 英光}, title = {透明膜で覆われた物体のワンショット干渉計測法:局所モデル適合法による膜厚と表面形状の同時測定}, booktitle = {精密工学会秋季大会学術講演会講演論文集}, year = 2008, }