@inproceedings{CTT100830719,
  author = {Y. Kim and A. Kuriyama and I. Ueda and S. Ohmi and K. Tsutsui and H. Iwai},
  title = {Electrical Characteristics of High-k La2O3 Thin Film Deposited by E-Beam Evaporation Method},
  booktitle = {},
  year = 2003,
}

@inproceedings{CTT100830720,
  author = {Y. Sasaki and B. Mizuno and S. Akama and R. Higaki and K. Tsutsui and S. Ohmi and H. Iwai},
  title = {Gas Phase Doping at Room Temperature},
  booktitle = {},
  year = 2002,
}

@inproceedings{CTT100830721,
  author = {Y. Sasaki and B. Mizuno and S. Akama and R. Higaki and K. Tsutsui and S. Ohmi and H. Iwai},
  title = {Helicon Wave Plasma Doping System},
  booktitle = {},
  year = 2002,
}