@article{CTT100547472, author = {Shiro Hino and Tomohiro Hatayama and Jun Kato and Naruhisa Miura and Tatsuo Oomori and Eisuke Tokumitsu}, title = {Anomalously High Channel Mobility in SiC MOSFET with Al2O3/SiOx/SiC Gate Structure}, journal = {Materials Science Forum}, year = 2009, } @article{CTT100566228, author = {Tomohiro Hatayama and Shiro Hino and Naruhisa Miura and Tatsuo Oomori and Eisuke Tokumitsu}, title = {Remarkable Increase in the Channel Mobility of SiC-MOSFETs by Controlling the Interfacial SiO2 Layer Between Al2O3 and SiC}, journal = {IEEE Transactions on Electron Devices}, year = 2008, } @article{CTT100560646, author = {S.Hino and Tomohiro Hatayama and J.Kato and E.Tokumitsu and N.Miura and T.Oomori}, title = {High channel mobility 4H-SiC metal-oxide-semiconductor field-effect transistor with low temperature metal-organic chemical-vapor deposition grown Al2O3 gate insulator}, journal = {Applied Physics Letters}, year = 2008, } @article{CTT100508734, author = {Shiro Hino and Tomohiro Hatayama and Naruhisa Miura and Tatsuo Oomori and Eisuke Tokumitsu}, title = {Fabrication and Charactarization of 4H-SiC MOSFET with MOCVD-grown Al2O3 Gate Insulator}, journal = {Materials Science Forum}, year = 2007, } @inproceedings{CTT100544411, author = {S.Hino and Tomohiro Hatayama and J.Kato and N. Miura and T.Oomori and E.Tokumitsu}, title = {Anomalously High Channel Mobility in SiC-MOSFETs with Al2O3/SiOx/SiC Gate Structure}, booktitle = {}, year = 2007, } @inproceedings{CTT100544415, author = {日野史郎 and 畑山 智裕 and 加藤潤 and 守谷仁 and 三浦 成久 and 大森 達夫 and 徳光永輔}, title = {極薄膜酸化膜を用いたAl2O3/SiC MOSFETのチャネル移動度の向上(Ⅱ)}, booktitle = {第68回 応用物理学会学術講演会}, year = 2007, } @inproceedings{CTT100544536, author = {畑山 智裕 and 日野史郎 and 加藤潤 and 徳光永輔 and 三浦 成久 and 大森 達夫}, title = {極薄酸化膜を用いたAl2O3/SiC-MOSFETのチャネル移動度の向上}, booktitle = {}, year = 2007, } @inproceedings{CTT100544538, author = {日野史郎 and 畑山 智裕 and 加藤潤 and 徳光永輔 and 三浦 成久 and 大森 達夫}, title = {Al2O3/SiC-MOSFETトランジスタ特性のAl2O3堆積温度依存性}, booktitle = {}, year = 2007, } @inproceedings{CTT100507110, author = {日野史郎 and 畑山智裕 and 徳光永輔 and 三浦成久 and 大森達夫}, title = {MOCVD法により形成したAl2O3薄膜をゲート絶縁膜とする4H-SiC MOS-FETの作製と評価}, booktitle = {第67回応用物理学会学術講演会}, year = 2006, } @inproceedings{CTT100507134, author = {日野史郎 and 畑山智裕 and 徳光永輔 and 三浦成久 and 大森達夫}, title = {MOCVD法による堆積膜/SiCの作製と評価}, booktitle = {}, year = 2006, } @inproceedings{CTT100507178, author = {Tomohiro Hatayama and Shiro Hino and Shio Hagiwara and Eisuke Tokumitsu}, title = {Preparation of Al2O3 Thin Films on SiC by Metal Organic Chemical Vapor Deposition}, booktitle = {}, year = 2006, }