@article{CTT100507870, author = {Shiro Hino and Makoto Nakayama and Kenji Takahashi and Hiroshi Funakubo and Eisuke Tokumitsu}, title = {Characterization of Hafnium Oxide Thin Films by Sorce Gas Pulse Introduced Metalorganic Chemical Vapor Deposition using Amino-Family Hf Precursors}, journal = {Jpn. J. Appl. Phys.}, year = 2003, } @article{CTT100548651, author = {Kenji Takahashi and Makoto Nakayama and Shiro Hino and Eisuke Tokumitsu and Hiroshi Funakubo}, title = {Growth of Hafnium Oxide Films by Metalorganic Chemical Vapor Deposition Using Oxygen-Free Hf[N(C2H5)2]4 Precursor and Their Properties}, journal = {Integrated Ferroelectrics}, year = 2003, } @article{CTT100507873, author = {Kenji Takahashi and Makoto Nakayama and Shintaro Yokoyama and Takeshi Kimura and Eisuke Tokumitsu}, title = {Preparation of hafnium oxide films from oxygen-free Hf[N(C2H5)2]4 precursor and their properties}, journal = {Applied Surface Science}, year = 2003, }