@article{CTT100508735, author = {E.Tokumitsu and Y.Takano and H.Shibata and H.Saiki}, title = {Fabrication and Characterization of M-I-FIS ferroelectric-gate structures using HfAlOx buffer layer}, journal = {Journal of Microelectronic Engineering}, year = 2007, } @inproceedings{CTT100544540, author = {高野 友一 and 斎木博和 and 柴田宏 and 徳光永輔}, title = {金属/絶縁体/強誘電体/絶縁体/半導体構造(M-I-FIS構造)キャパシタの作製と評価}, booktitle = {}, year = 2007, }