@article{CTT100586716,
  author = {Keita Inoue and Dhanorm Plumwongrot and Nobuhiko Nishiyama and Shinichi Sakamoto and Haruki Enomoto and Shigeo Tamura and Takeo Maruyama and Shigehisa Arai},
  title = {Loss Reduction of Si Wire Waveguide Fabricated by Edge-Enhancement Writing for Electron Beam Lithography and Reactive Ion Etching Using Double Layered Resist Mask with C60},
  journal = {Jpn. J. Appl. Phys.},
  year = 2009,
}

@article{CTT100548976,
  author = {S. Sakamoto and Y. Nishimoto and S. Tamura and T. Maruyama and N. Nishiyama and S. Arai},
  title = {Strongly Index-Coupled Membrane BH-DFB Lasers With Surface Corrugation Grating},
  journal = {IEEE J. Select. Top. in Quantum Electron.},
  year = 2007,
}

@inproceedings{CTT100599901,
  author = {井上敬太 and 渥美裕樹 and 西山伸彦 and 田村茂雄 and 荒井滋久},
  title = {SOI基板上多層a-Si細線導波路の伝搬特性の評価},
  booktitle = {第57回応用物理学関係連合講演会},
  year = 2010,
}

@inproceedings{CTT100565922,
  author = {Keita Inoue and Dhanorm Plumuwongrot and Nobuhiko Nishiyama and Shinichi Sakamoto and Haruki Enomoto and Shigeo Tamura and Takeo Maruyama and Shigehisa Arai},
  title = {Loss Reduction of SiWireWaveguide on SOI Substrate Prepared by Parallel Plate RIE using Double Layered Resist Mask with C60},
  booktitle = {IEEE NMDC2008},
  year = 2008,
}

@inproceedings{CTT100564654,
  author = {Keita Inoue and Nobuhiko Nishiyama and Haruki Enomoto and Shigeo tamura and Takeo Maruyama and Shigehisa Arai},
  title = {Evaluation of Si Wire Waveguide Fabricated by Parallel Plate RIE Process using Double Layered EB Resist Containing C60},
  booktitle = {Digest of iNOW2008},
  year = 2008,
}

@inproceedings{CTT100549006,
  author = {井上敬太 and プルームウォンロート･タノーム and 西山伸彦 and 阪本真一 and 榎本晴基 and 田村茂雄 and 丸山武男 and 荒井滋久},
  title = {C60含有と非含有EBレジストZEPの重ね塗りによるSi導波路ドライエッチング形状の向上},
  booktitle = {第55回応用物理学関係連合講演会},
  year = 2008,
}

@inproceedings{CTT100549003,
  author = {プルームウォンロート・タノーム and 小沢浩二 and 黒川宗高 and 田村茂雄 and 丸山武男 and 西山伸彦 and 荒井滋久},
  title = {低温現像によるGaInAsP/InP量子細線構造の線幅ばらつきの低減},
  booktitle = {第55回応用物理学関係連合講演会},
  year = 2008,
}

@inproceedings{CTT100565931,
  author = {Takeo Maruyama and Tadashi Okumura and Masaki Kanemaru and Shinichi Sakamoto and shigeo tamura and SHIGEHISA ARAI},
  title = {Thermal characteristics of GaInAsP/InP membrane DFB lasers on SOI substrate integrated with rib-waveguide},
  booktitle = {The 12th Opto-Electronics and Communications Conference},
  year = 2007,
}

@inproceedings{CTT100565927,
  author = {Tadashi Okumura and Takeo Maruyama and Masaki Kanemaru and Shinichi Sakamoto and shigeo tamura and SHIGEHISA ARAI},
  title = {Fundamental-mode operation of GaInAsP/InP membrane DFB lasers bonded on SOI substrate and its waveguide integration},
  booktitle = {The 19th Indium Phosphide and Related Material},
  year = 2007,
}

@inproceedings{CTT100667677,
  author = {賈学英 and 小島隆 and 早船嘉典 and 田村茂雄 and 渡辺正裕 and 荒井滋久},
  title = {近接効果補正露光による量子細線構造のサイズ揺らぎの低減},
  booktitle = {},
  year = 1997,
}