@article{CTT100771841,
  author = {前田幸平 and Van Nhu Hai and 西岡國生 and 松谷晃宏 and 立木隆 and 内田貴司},
  title = {MOD 法により Si3N4/SiO2メンブレン上に製作したVOxマイクロボロメータの特性評価},
  journal = {電気学会論文誌 A},
  year = 2018,
}

@article{CTT100778577,
  author = {Tomotarou Ezaki and Akihiro Matsutani and Kunio Nishioka and Dai Shoji and Mina Sato and Takayuki Okamoto and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita},
  title = {Surface potential on gold nanodisc arrays fabricated on silicon under light irradiation},
  journal = {Surface Science},
  year = 2018,
}

@article{CTT100756639,
  author = {Tsuyoshi Takahashi and Akihiro Matsutani and Dai Shoji and Kunio Nishioka and Mina Sato and Takayuki Okamoto and Tomotarou Ezaki and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita},
  title = {Optical performance of Au hemispheric sub-microstructure on polystyrene quadrumer},
  journal = {Colloids. Surf. A.},
  year = 2017,
}

@article{CTT100704496,
  author = {Akihiro Matsutani and Kunio Nishioka and Mina Sato},
  title = {Energy dispersive X-ray spectroscopy analysis of Si sidewall surface etched by deep-reactive ion etching},
  journal = {Japanese Journal of Applied Physics},
  year = 2016,
}

@article{CTT100722482,
  author = {Sachiko Matsushita and Akihiro Matsutani and Yasushi Morii and Daito Kobayashi and Kunio Nishioka and Dai Shoji and Mina Sato and Tetsu Tatsuma and Takumi Sannomiya and Toshihiro Isobe and Akira Nakajima},
  title = {Calculation and Fabrication of Two-dimensional Complete Photonic Bandgap Structures composed of Rutile TiO2 Single Crystals in Air/Liquid},
  journal = {J. MATER. SCI.},
  year = 2015,
}

@article{CTT100701828,
  author = {S. Sano and K. Nishioka and A. Matsutani and T. Isobe and A. Nakajima and S. Matsushita},
  title = {Simple fabrication of micro-polygons and micro-honeycombs utilizing thermal deformation of monolayer colloidal crystals during reactive ion etching},
  journal = {Colloid. Surf. A},
  year = 2015,
}

@article{CTT100701826,
  author = {T. Takahashi and A. Matsutani and D. Shoji and K. Nishioka and M. Sato and T. Isobe and A. Nakajima and S. Matsushita},
  title = {Microfabrication for a polystyrene quadrupole by template-assisted self-assembly},
  journal = {Colloid. Surf.A},
  year = 2015,
}

@article{CTT100692928,
  author = {Akihiro Matsutani and Kunio Nishioka and Mina Sato and Dai Shoji and Daito Kobayashi and Toshihiro Isobe and Akira Nakajima and Tetsu Tatsuma and Sachiko Matsushita},
  title = {Angled etching of (001) rutile Nb-TiO2 substrate using SF6-based capacitively coupled plasma reactive ion etching},
  journal = {Japanese Journal of Applied Physics},
  year = 2014,
}

@article{CTT100672802,
  author = {Akihiro Matsutani and Mikiro Hayashi and Yasushi Morii and Kunio Nishioka and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita},
  title = {SF6-Based Deep Reactive Ion Etching of (001) Rutile TiO2 Substrate for Photonic Crystal Structure with Wide Complete Photonic Band Gap},
  journal = {Japanese Journal of Applied Physics},
  year = 2012,
}

@inproceedings{CTT100760776,
  author = {松谷晃宏 and 西岡國生 and 佐藤美那},
  title = {XeF2気相エッチングによるSi マイクロ凹面鏡構造の製作},
  booktitle = {第65回応用物理学会春季学術講演会 講演予稿集},
  year = 2018,
}

@inproceedings{CTT100762784,
  author = {三田 真衣 and 松谷 晃宏 and 西岡 國生 and 佐藤 美那 and 磯部 敏宏 and 中島 章 and 松下 祥子},
  title = {金属コーティングシリカ球ピラミッドアレイの作製とその光学特性},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100791896,
  author = {陳政霖 and 松谷 晃宏 and 西岡 國生 and 朴 鍾淏 and 初澤 毅 and 栁田 保子},
  title = {ヒドロゲルファイバー表面形状形成のためのマイクロノズル作製},
  booktitle = {第78回応用物理学会秋季学術講演会集},
  year = 2017,
}

@inproceedings{CTT100742178,
  author = {前田 幸平 and 西岡國生 and ヴァン ニュハイ and 松谷晃宏 and 立木 隆 and 内田 貴司},
  title = {Deep-RIEとXeF2気相エッチングによるVOx/Si3N4/SiO2メンブレンの製作},
  booktitle = {第64回応用物理学会春季学術講演会講演予稿集},
  year = 2017,
}

@inproceedings{CTT100735789,
  author = {江崎 智太郎 and 松谷 晃宏 and 西岡 國生 and 庄司 大 and 佐藤 美那 and 岡本 隆之 and 磯部 敏宏 and 中島 章 and 松下 祥子},
  title = {プラズモン共鳴により生じる金属ナノ構造体の表面電位差の測定},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100722498,
  author = {Tsuyoshi Takahashi and Akihiro Matsutani and Dai Shoji and Kunio Nishioka and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita},
  title = {Microfabrication of polystyrene quadrupole combined with top-down and bottom-up approach},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100733809,
  author = {清水美咲 and 西岡國生 and 松谷晃宏 and 吉田和弘 and 金俊完},
  title = {DRIEによる高アスペクト比三角柱－スリット形電極対(TPSE)の製作に関する研究},
  booktitle = {山梨講演会講演論文集},
  year = 2016,
}

@inproceedings{CTT100734300,
  author = {Misaki Shimizu and Kunio Nishioka and Akihiro Matsutani and Kazuhiro Yoshida and Joon-wan Kim},
  title = {Study on Fabrication of High Aspect Ratio TPSE by using DRIE},
  booktitle = {20th International Conference  on Mechatronics  Technology（ICMT2016）},
  year = 2016,
}

@inproceedings{CTT100726818,
  author = {土子政貴 and 青木才子 and 松谷晃宏 and 西岡國生},
  title = {脂肪酸を添加した溶液中におけるマイクロパターン表面の摩擦特性},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100735788,
  author = {江崎 智太郎 and 松谷 晃宏 and 西岡 國生 and 庄司 大 and 佐藤 美那 and 岡本 隆之 and 磯部 敏宏 and 中島 章 and 松下 祥子},
  title = {Si/SiO2上金ナノ円盤の表面電位の光照射依存およびその構造依存性},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100703598,
  author = {西岡國生 and 佐藤美那 and 松谷晃宏},
  title = {Deep-RIEにより形成されたトレンチ側面の化学組成に関するプラズマ発光分光分析からの考察},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100704334,
  author = {大竹真理子 and 岸哲生 and 矢野哲司 and 松谷晃宏 and 西岡國生},
  title = {一方向性光結合を示すテルライトガラス回折格子の作製},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100735790,
  author = {Tomotarou Ezaki and Akihiro Matsutani and Kunio Nishioka and Dai Shoji and Mina Sato and Takayuki Okamoto and Toshihiro Isobe and Akira Nakajima and Sachiko Matsushita},
  title = {Kelvin probe force microscopic images on gold nanodisks with and without light irradiation},
  booktitle = {},
  year = 2016,
}

@inproceedings{CTT100699542,
  author = {Akihiro Matsutani and Mina Sato and Kunio Nishioka and Dai Shoji},
  title = {EDX analysis of Si sidewall surface etched by deep-RIE process},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100683819,
  author = {佐藤 美那 and 西岡國生 and 庄司大 and 松谷晃宏},
  title = {Deep-RIEにより深掘りエッチングされたSiエッチング側面のEDX分析},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100686996,
  author = {高橋 毅 and 松谷 晃宏 and 庄司 大 and 西岡 國生 and 佐藤 美那 and 磯部 敏宏 and 中島 章 and 松下 祥子},
  title = {トップダウン・ボトムアップ統合アプローチによるポリスチレン四重極子の作製},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100668639,
  author = {小林大斗 and 松谷晃宏 and 西岡國生 and 庄司 大 and 佐藤 美那 and 磯部敏宏 and 中島章 and 立間 徹 and 松下祥子},
  title = {傾斜ドライエッチングを用いた酸化チタンフォトニック結晶の作製と評価},
  booktitle = {},
  year = 2014,
}

@inproceedings{CTT100634000,
  author = {林未来郎 and 守井泰士 and 松谷晃宏 and 西岡國生 and 磯部敏宏 and 松下祥子 and 中島章},
  title = {ドライエッチングによる(001)TiO2単結晶のマイクロ規則構造の作製},
  booktitle = {},
  year = 2012,
}