@article{CTT100549908, author = {S.R.Mohanty and T.Sakamoto and Y.Kobayashi and Naoya Iizuka and Nozomu Kishi and MASATO WATANABE and Tohru Kawamura and AKITOSHI OKINO and KAZUHIKO HORIOKA and E.Hotta}, title = {Influence of electrode separation and gas curtain on extreme ultraviolet emission of a gas jet z-pinch source}, journal = {Applied Physics Letters}, year = 2006, } @inproceedings{CTT100549107, author = {Sakuchi Osamu and Iizuka Naoya and Jiang Fei and Watanabe Masato and Kawamura Tohru and Okino Akitoshi and Horioka Kazuhiko and Hotta Eiki}, title = {Development of a Gas Jet-Type Z-pinch Plasma Light Source for EUV Lithography}, booktitle = {}, year = 2008, } @inproceedings{CTT100544716, author = {MASATO WATANABE and Nozomu Kishi and Naoya Iizuka and Shinya Orishimo and Fei Jiang and AKITOSHI OKINO and EIKI HOTTA}, title = {Optical Observation of Gas Jet Z-Pinch Discharge Produced Extreme Ultraviolet Light Source}, booktitle = {}, year = 2007, } @inproceedings{CTT100556229, author = {岸望 and 飯塚直哉 and 坂本敏郎 and 宋仁皓 and 小林靖典 and S.R. Mohanty and 渡辺正人 and 沖野晃俊 and 堀田栄喜}, title = {同軸二重ノズル型電極を用いたEUV光源の出力特性}, booktitle = {平成18年電気学会基礎・材料・共通部門大会(CD-ROM)}, year = 2006, } @inproceedings{CTT100556224, author = {Naoya Iizuka and Toshiro Sakamoto and Yasunori Kobayashi and Inho Song and Smruti R. Mohanty and Masato Watanabe and AKITOSHI OKINO and Eiki Hotta}, title = {Optimization of a gas jet-type Z-pinch discharge EUV light source}, booktitle = {}, year = 2006, }