@inproceedings{CTT100556229, author = {岸望 and 飯塚直哉 and 坂本敏郎 and 宋仁皓 and 小林靖典 and S.R. Mohanty and 渡辺正人 and 沖野晃俊 and 堀田栄喜}, title = {同軸二重ノズル型電極を用いたEUV光源の出力特性}, booktitle = {平成18年電気学会基礎・材料・共通部門大会(CD-ROM)}, year = 2006, } @inproceedings{CTT100556224, author = {Naoya Iizuka and Toshiro Sakamoto and Yasunori Kobayashi and Inho Song and Smruti R. Mohanty and Masato Watanabe and AKITOSHI OKINO and Eiki Hotta}, title = {Optimization of a gas jet-type Z-pinch discharge EUV light source}, booktitle = {}, year = 2006, } @inproceedings{CTT100556222, author = {Inho Song and Yasunori Kobayashi and Toshiro Sakamoto and Smruti R. Mohanty and Masato Watanabe and Akitoshi Okino and Tohru Kawamura and Koichi Yasuoka and Kazuhiko Horioka and Eiki Hotta}, title = {Performance of a Gas Jet Type Z-Pinch EUV Light Source}, booktitle = {31st International Conference on Micro- Nano-Engineering}, year = 2005, } @inproceedings{CTT100556227, author = {渡邊正人 and 宋仁皓 and 小林靖典 and 坂本敏郎 and S.R.Mohanty and 沖野晃俊 and 堀岡一彦 and 堀田栄喜}, title = {同軸ノズル型電極を用いた放電プラズマからのEUV発光特性}, booktitle = {第66回応用物理学会学術講演会講演予稿集}, year = 2005, } @inproceedings{CTT100556228, author = {渡邊正人 and 宋仁皓 and 小林靖典 and 坂本敏郎 and S.R.Mohanty and 沖野晃俊 and 堀岡一彦 and 堀田栄喜}, title = {同軸ノズル型電極を用いた放電プラズマからのEUV発光特性}, booktitle = {第66回応用物理学会学術講演会講演予稿集}, year = 2005, }