@inproceedings{CTT100569879,
  author = {Yutaka Tanaka and Masafumi EBISAWA and Shinichi Yokota and Kazuya Edamura},
  title = {Miniaturized and High‐Powered Micro Pump Using Functional Fluid ECF},
  booktitle = {12th International Conference on Mechatronics Technology (ICMT 2008).},
  year = 2008,
}