@inproceedings{CTT100588827,
  author = {Naoki Wakiya and Takeshi Kitayama and Naonori Sakamoto and Hisao Suzuki and Teiko Kadowaki and keisuke fujito and Hidemitsu Takaoka and Akira Osada and TAKANORI KIGUCHI and Kazuo Shinozaki},
  title = {Control of poly-type and mechanical properties of Al<sub>2</sub>O<sub>3</sub> film prepared by pulsed laser deposition and rf magnetron sputtering},
  booktitle = {The IUMRS International Conference in Asia 2008},
  year = 2008,
}